Abstract:We have developed and elaborated a series of Mg/Co-based periodic multilayers to build efficient mirrors for the extreme ultraviolet (EUV) range. For s-polarized light and at 45 degrees of grazing incidence, the reflectivity of as-deposited Mg/Co is 42.6% at 25.1 nm. X-ray emission spectroscopy and nuclear magnetic resonance measurements do not indicate any noticeable interdiffusion at the interfaces between layers. Scanning transmission electronic microscopy images attest the high structural quality of the stack. X-ray reflectivity (XRR) curves in the hard x-ray and EUV domains confirm this description and estimate a weak interfacial roughness (similar to 0.5 nm). Taking advantage of the magnetic character of Co, we have performed resonant magnetic reflectivity measurements by scanning the photon energy around the Co L absorption edge for opposite circular polarizations. The magnetization profile of the Co layers within Co/Mg determined with an expected depth resolution of one monolayer confirms the interface abruptness. Scanning electron microscopy images and XRR curves give evidence of the thermal stability of Mg/Co up to 300 degrees C. From that value, a strong change in the sample morphology due to the delamination of the multilayer from the substrate occurs. This should account for the drastic reflectivity drop observed above this temperature. Starting from Mg/Co, we have inserted a Zr layer at one or at the other interface or at both interfaces to estimate the effect of the introduction of a third material within the period. We have found that Mg/Co/Zr is more efficient (50% of reflectivity) than Mg/Zr/Co and Mg/Zr/Co/Zr (similar to 40%). Through time-of-flight secondary ion mass spectrometry depth profiling and NMR measurements, we have assigned this difference to an intermixing process when Co layers are deposited onto Zr layers.

Magnetic and Electronic Structure study of Fe/MgO/Fe/Co Multilayer Stack Deposited by E-Beam Evaporation

Electromagnetic and Microwave Properties of Discontinuous CoFeB/MgO Soft Magnetic Multilayer Films

Asymmetric magnetism at the interfaces of MgO/FeCoB bilayers by exchanging the order of MgO and FeCoB

Magnetoresistance effect observed in Fe/Mo multi-layers prepared by electron beam evaporation

X-ray photoemission study of CoFeB/MgO thin film bi-layers

Hard x-ray standing-wave photoemission insights into the structure of an epitaxial Fe/MgO multilayer magnetic tunnel junction

Structural, chemical and electronic properties of the Co2MnSi(001)/MgO interface

Optical, Chemical, Depth and Magnetic Characterization of Mg/Co-Based Nanometric Periodic Multilayers

Study of the relationship between magnetic anisotropy and composition ratio of Fe oxide to Fe at CoFeB/MgO film interface

Tailoring Interlayer Exchange Coupling of Ferromagnetic Films Across MgO with Fe Nanoclusters

Magnetoresistance Transformation Observed in Fe/Mo Multilayers Prepared by Electron Beam Evaporation

Unveiling electronic structure and magnetic properties of AFe 2 O 4 (A = Co, Ni, Zn, and Mg): Synergizing experimentation with DFT investigation

Electronic structures of MgO/Fe interfaces with perpendicular magnetization revealed by hard X-ray photoemission with an applied magnetic field

Structural Transition and Magnetic Properties of Evaporated Fe/Gd Multilayers

Intermixing of iron and cobalt with oxygen-rich magnesium oxide in CoFeB/MgO/CoFeB magnetic tunneling junctions

Ferromagnetic Co/Ni/Fe and Co/Fe Multilayer Films Prepared by A Three-Filtered-Mevva-Ion-Source-Deposition System

Interfacial perpendicular magnetic anisotropy in Co2FeSi alloy films sandwiched by Pt and MgAl2O4

The Enhanced Magnetization Observed in Fe/Mo Multilayers Deposited by Ion-Beam Sputtering

Impact of strain and morphology on magnetic properties of Fe$_3$O$_4$/NiO bilayers grown on Nb:SrTiO$_3$(001) and MgO(001)

Structural, chemical, and magnetic investigation of a graphene/cobalt/platinum multilayer system on silicon carbide

X-ray small-angle reflection and high-angle diffraction studies on Co/Cu magnetic multilayers