Suspended Tungsten Trioxide (WO3) Gate AlGaN/GaN Heterostructure Deep Ultraviolet Detectors with Integrated Micro-Heater.

Jianwen Sun,Teng Zhan,Zewen Liu,Junxi Wang,Xiaoyan Yi,Pasqualina M. Sarro,Guoqi Zhang
DOI: https://doi.org/10.1364/oe.27.036405
IF: 3.8
2019-01-01
Optics Express
Abstract:A suspended WO3-gate AlGaN/GaN heterostructure photodetector integrated with a micro-heater is micro-fabricated and characterized for ultraviolet photo detection. The transient optical characteristics of the photodetector at different temperatures are studied. The 2DEG-based photodetector shows a recovery (170 s) time under 240 nm illumination at 150 ℃. The measured spectral response of WO3-gate AlGaN/GaN heterostructure shows a high response in deep ultraviolet range. Responsivity at 240 nm wavelength is 4600 A/W at 0.5 V bias. These characteristics support the feasibility of a high accuracy deep UV detector based on the suspended AlGaN/GaN heterostructure integrated with a micro-heater.
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