Fabrication, Corrosion, And Mechanical Properties Of Magnetron Sputtered Cu-Zr-Al Metallic Glass Thin Film

Xianshun Wei,Chengxi Ying,Jing Wu,Haoran Jiang,Biao Yan,Jun Shen
DOI: https://doi.org/10.3390/ma12244147
IF: 3.4
2019-01-01
Materials
Abstract:The appearance of thin film metallic glasses (TFMGs) is gaining increasing interest because of their unique mechanical and anticorrosion properties and potential engineering applications. In this study, Cu-Zr-Al ternary thin film metallic glasses were fabricated by using DC magnetron sputtering equipment with various target powers. The evolution of the structure was systematically investigated by grazing incidence X-ray diffractometer, scanning electron microscopy, and transmission electron microscopy. The deposition rate increases with the increasing of applied target power. The as-deposited thin films show an amorphous structure. The compositional fluctuations on the nanometer scale indicate the presence of two Cu- and Zr-rich amorphous phases. The electrochemical corrosion measurements indicated that Cu-Zr-Al thin film metallic glasses had good corrosion resistance in the sulfuric acid solution. Nanoindentation results showed that the mechanical deformation was found to be homogenous and reproducible with a high value range for the hardness and modulus.
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