Abstract:<p>An experimental study is conducted to investigate the multi-length scale evolution from micro/nano-structural arrays to V-grooves by femtosecond laser-irradiations, considering the effects of laser polarization and the number of scans on the periodic features and the micro/nano-structures. It is found that the evolution from micro/nano-structural arrays to V-grooves is gradual as the laser fluence, scan speed or the number of scans is increased. Laser-induced surface instability, hatching effects, Coulomb explosions, melting, and evaporation are found to be the underlying mechanisms for the micro/nano structural formation. As the laser fluence increases, the agglomerated nanoparticles change from sparse to dense, so that the boundary between the LIPSS (laser-induced periodic surface structures) becomes less obvious. The oxygen (O) elements attached to the surface of nanoparticles increase with an increase in laser fluence. A high-spatial-frequency LIPSS (HSFL) can transform to low-spatial-frequency LIPSS (LSFL) as the laser fluence excesses the ablation threshold, while the spatial period of the HSFL and LSFL is independent of fluence. It is shown that the irradiated surface evolves from a near-damage-free zone to one with a recast layer and thermal-induced micro-cracks, defined as heat-affected zones (HAZ). Near thermal damage-free micro/nano-structural arrays with different orientations on the sidewalls of the grooves are fabricated at close to the laser ablation threshold by multi-pass scanning. A self-organizing model is developed which shows that laser polarization leads to the asymmetry of energy distribution and the structural array is arranged along the main direction of energy flow. The model analysis shows a good agreement with experimental results and provides an efficient means to understand the interaction between femtosecond laser and silicon carbide (SiC).</p>

Convex Grid-Patterned Microstructures on Silicon Induced by Femtosecond Laser Assisted with Chemical Etching

Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification

Controllable Si micro-structuring by temporally modulated single-shot femtosecond pulse lithography

Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation

Two-dimensional microstructures induced by femtosecond vector light fields on silicon.

Comparison of structures and hydrophobicity of femtosecond and nanosecond laser-etched surfaces on silicon

Mask-Free Construction of Three-Dimensional Silicon Structures by Dry Etching Assisted Gray-Scale Femtosecond Laser Direct Writing

Parallel Grooved Microstructure Manufacturing on the Surface of Si3N4 Ceramics by Femtosecond Laser

Convex Silica Microlens Arrays Via Femtosecond Laser Writing.

Micro-Fabrication and Monitoring of Three-Dimensional Microstructures Based on Laser-Induced Thermoplastic Formation

Sub-wavelength Ripple Formation on Silicon Induced by Femtosecond Laser Radiation

Laser Etching of Groove Structures with Micro-Optical Fiber-Enhanced Irradiation

One-Step femtosecond laser irradiation of Single-Crystal Silicon: Evolution of Micro-Nano structures and damage investigation

Periodic Microstructures Fabricated by Laser Interference with Subsequent Etching

Evolution of Microstructures on Silicon Induced by Femtosecond Laser with Multiple Pulses

Silicon micro-structuring using ultra-short laser pulses

Deepening of nanograting structures on Si by a two-step laser spatial-selective amorphization strategy combined with chemical etching

Fabrication of microstructures by picosecond laser

Formation of Array Microstructures on Silicon by Multibeam Interfered Femtosecond Laser Pulses

Fabrication of Micro Grooves on Silicon by Micro Optical Fiber Enhanced Pulse Laser Irradiation

Fabrication of high-aspect-ratio fused silica microstructures with large depths using Bessel-beam femtosecond laser-assisted etching