Abstract:Fast tool servo diamond turning is conventionally a spiral path-based process widely used to efficiently fabricate non-rotationally symmetric surfaces with ultra-fine accuracy. However, the technique is naturally restricted by the demanding bandwidth and resolution requirements, which are directly related to the complexity and size of the machining surface. Moreover, non-smooth trajectories required for machining complex lens array with discontinuities, due to overlapping sharp edges, induce vibrations causing the surface quality to deteriorate, and adding additional barriers to using this conventional technique in broader applications. In this paper, a new diamond machining approach is proposed to address its inherent drawbacks. Using the new method, complex lens array consisting of arbitrary lenslet shapes could be fabricated in an extendable way without the typical limitations. Theoretical investigations of the unique cutting kinematics, motion determination, servo synchronization and compensation will be carried out. To predict the machined surface topography, the surface generation mechanism with consideration of both the kinematic tool/workpiece interaction and elastic recovery of materials is presented. The experimental fabrication of hexagonal micro-sphere lens array, micro-freeform lens array, as well as seamlessly stitched sinusoidal surface with quadrupled areas was highly consistent and aligned with the theoretical predictions, thus demonstrating the effectiveness of the new approach and its potential for broader applications.

Mechanism of Brittle Fracture in Diamond Turning of Microlens Array on Polymethyl Methacrylate

Controllable Diamond Cutting of Structured Surfaces with Subnanometric Height Features on Silicon

Study of Integrated Milling-Grinding of Microlens Array on Binderless Tungsten Carbide with Diamond Grains Ball-End Tool

A New Diamond Machining Approach for Extendable Fabrication of Micro-Freeform Lens Array

Ductile machining of single-crystal silicon for microlens arrays by ultraprecision diamond turning using a slow tool servo

Improvement of Dimensional Accuracy and Surface Quality of Microlens Arrays by a Profile Cutting Method

Laser-assisted Slow Tool Servo Diamond Turning of Single-Crystal Silicon for Fabricating Micro-Lens Arrays

Experimental Investigation on Form Error for Slow Tool Servo Diamond Turning of Micro Lens Arrays on the Roller Mold

Study of Quadrifoliate Tool-Setting Method for Diamond Milling of Microlens Array

Fracture Mechanics of Microcrystalline/nanocrystalline Composited Multilayer Chemical Vapor Deposition Self-Standing Diamond Films

Critical Undeformed Chip Thickness of Brittle Materials in Single Point Diamond Turning

Fabrication of high aspect-ratio aspheric microlens array based on local spiral diamond milling

Ultra-precision Manufacturing of Microlens Arrays Using an Optimum Machining Process Chain

Modeling and Experiment of Concave Microlens Array on Silicon Wafer by Grinding-Polishing Process with Diamond Slurry

Brittle-Ductile Transition In Diamond Cutting Of Silicon Single Crystals

Fabrication of Diamond Micro Tool Array (DMTA) for Ultra-Precision Machining of Brittle Materials

Cutting Depth-Oriented Ductile Machining of Infrared Micro-Lens Arrays by Elliptical Vibration Cutting.

Fabrication of a Microlens Array Featuring a High Aspect Ratio with a Swinging Diamond Tool

Improved Machinability of Single Crystal Silicon by Applying In-Situ Laser-Vibration Hybrid Assisted Diamond Cutting

Ultraprecision machining of microlens arrays with integrated on-machine surface metrology.

Fabrication of infrared hexagonal microlens array by novel diamond turning method and precision glass molding