Abstract:In this study, we investigated the humidity sensing properties of TiO2-based ceramics doped with tantalum pentoxide (Ta2O5) and indium tin oxide (ITO). Pure TiO2, 1%Ta-doped TiO2 (1%TTO), 1%ITO-doped TiO2 (1%ISTO), and 1%(Ta2O5 + ITO) co-doped TiO2 (1%ISTTO) ceramic samples were obtained by sintering at 1200 °C for 3 h. The rutile phase was observed in all samples. The lattice parameters of the single and co-doped samples were larger than those of pure TiO2, confirming the substitution of dopants. Porosity was observed in all ceramics. The mean grain sizes of all doped samples were significantly reduced compared to undoped TiO2. A homogeneous element dispersion was observed in the 1%TTO and 1%ISTTO ceramics, while segregation particles of related In-rich elements was observed in the 1%ISTO ceramic. Giant dielectric properties were not achieved in any samples due to the porosity. Nevertheless, excluding the undoped TiO2, the dielectric properties of all porous ceramics varied significantly with changes in humidity. The 1%ISTTO ceramic demonstrated superior humidity sensing properties, including a low maximum hysteresis error of 3.6% at 102 Hz. In contrast, the 1% TTO and 1% ISTO ceramics showed higher maximum hysteresis errors of 7.2% and 19.8%, respectively. Notably, the response and recovery times were 7.05 ± 0.18 and 2.48 ± 0.39 min, respectively, with good repeatability. This improvement is likely due to the synergistic effect of oxygen vacancies and Ta Ti · defects on the surface, enhancing the humidity sensing properties of the 1% ISTTO ceramic, coupled with its optimal microstructure due to its lowest porosity and grain size.

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