Abstract:Advances in micro- and nanofabrication technologies have enabled the development of novel micro- and nanomechanical resonators which have attracted significant attention due to their fascinating physical properties and growing potential applications. In this review, we have presented a brief overview of the resonance behavior and frequency tuning principles by varying either the mass or the stiffness of resonators. The progress in micro- and nanomechanical resonators using the tuning electrode, tuning fork, and suspended channel structures and made of graphene have been reviewed. We have also highlighted some major influencing factors such as large-amplitude effect, surface effect and fluid effect on the performances of resonators. More specifically, we have addressed the effects of axial stress/strain, residual surface stress and adsorption-induced surface stress on the sensing and detection applications and discussed the current challenges. We have significantly focused on the active and passive frequency tuning methods and techniques for micro- and nanomechanical resonator applications. On one hand, we have comprehensively evaluated the advantages and disadvantages of each strategy, including active methods such as electrothermal, electrostatic, piezoelectrical, dielectric, magnetomotive, photothermal, mode-coupling as well as tension-based tuning mechanisms, and passive techniques such as post-fabrication and post-packaging tuning processes. On the other hand, the tuning capability and challenges to integrate reliable and customizable frequency tuning methods have been addressed. We have additionally concluded with a discussion of important future directions for further tunable micro- and nanomechanical resonators.

Continuously Tuning The Resonant Characteristics Of Microcantilevers By A Laser Induced Photothermal Effect

On-Chip Electro-Optic Tuning of A Lithium Niobate Microresonator with Integrated In-Plane Microelectrodes

Mechanical and Electronic Approaches to Improve the Sensitivity of Microcantilever Sensors.

Photothermal Response in Semiconducting Microcantilevers Produced by Laser Excitation

Optomechanical transduction of an integrated silicon cantilever probe using a microdisk resonator

All-optical dynamic analysis of the photothermal and photoacoustic response of a microcantilever by laser Doppler vibrometry

Selective Photothermal Self-Excitation of Mechanical Modes of A Micro-Cantilever for Force Microscopy

Remote optical detection using microcantilevers

Enhancing responsivity and detection limit in tunable nano-electromechanical system resonator mass sensors

A Mass Sensing Technology Based on a Dynamic Microcantilever in Liquid

Optimizing the Laser Spot Positioning on Tailored Microcantilevers Used in Atomic Force Microscopy

Tunable MEMS cantilever resonators electrothermally actuated and piezoelectrically sensed

Sub-Nanometer Acoustic Vibration Sensing Using a Tapered-Tip Optical Fiber Microcantilever

Effect of Surface Elastic on the Response of Microcantilevers under Photothermal Excitation

Three-dimensional printed microcantilever with mechanical metamaterial for fiber-optic microforce sensing

Optimisation and artifacts of photothermal excitation of microresonators

Nano-Thickness Integrated Resonant Cantilevers With Surface-Stiffening Scheme For Ultra-Sensitive Detection Of Trace Chemicals

Nano-thick Resonant Cantilevers with a Novel Specific Reaction-Induced Frequency-Increase Effect for Ultra-Sensitive Chemical Detection

Design of a Hybrid Micro/Nano Cantilever-based Resonant Sensor and its Fabrication Method

Tunable Micro- and Nanomechanical Resonators

Active Frequency Tuning of the Cantilever Nanoresonator Utilizing a Phase Transformation of NiTi Thin Film