Nano-thick Resonant Cantilevers with a Novel Specific Reaction-Induced Frequency-Increase Effect for Ultra-Sensitive Chemical Detection

Yongliang Yang,Xiaoyuan Xia,Xiaohua Gan,Pengcheng Xu,Haitao Yu,Xinxin Li

DOI: https://doi.org/10.1088/0960-1317/20/5/055022

2010-01-01

Journal of Micromechanics and Microengineering

Abstract:Theoretical analysis is implemented, which results in an interesting conclusion that thinning a resonant cantilever into nano-scale is in favor of achieving ultra-sensitivity by employing a cantilever spring-stiffening sensing effect instead of the conventional mass-loading sensing effect. Using torsion-mode resonance, T-shaped silicon cantilevers are designed and fabricated, with the cantilever silicon thickness of 95 nm. With both the Lorentz force resonance exciting and the piezoresistive self-sensing elements being integrated, the nano-thick cantilever is with its double surfaces modified by self-assembling a sensing molecule layer of acidized carbon-oxy-ethyl-silane-triol, and is then used to detect ppm-level trace trimethylamine vapor via specific molecule adsorption. The specific reaction-induced double-side surface stress acts as an axial force to increase the resonant frequency, with the measured sensitivity 23 times higher than that of the conventional mass-load (gravimetric) method where the frequency decreases. With the novel resonant sensing scheme, the nano-thick cantilevers show promise for ultra-sensitive detection of trace-level gaseous chemicals.