A Design Study of Efficiency Enhancement in Silicon Photonic Thermo-Optic Phase Shifters

Francis Smith,Wuxiucheng Wang,Xiaodong Wang,Yaqian Li,Xiulan Cheng,Hui Wu
DOI: https://doi.org/10.1109/oic.2019.8714481
2019-01-01
Abstract:We study the process and physical design parameters of a silicon photonic thermo-optic phase shifter with etched air trenches to improve energy efficiency. Multi-physics simulation and measurement results from a test chip generate design guidelines.
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