Abstract:Integrated photonic circuits have transformed data communication, biosensing, and light detection and ranging, and hold wide-ranging potential for optical computing, optical imaging and signal processing. These applications often require tunable and reconfigurable photonic components, most commonly accomplished through the thermo-optic effect. However, the resulting tuning window is limited for standard optical materials such as silicon dioxide and silicon nitride. Most importantly, bidirectional thermal tuning on a single platform has not been realized. For the first time, we show that by tuning and optimizing the deposition conditions in inductively-coupled plasma chemical vapor deposition (ICPCVD) of silicon dioxide, this material can be used to deterministically tune the thermo-optic properties of optical devices without introducing significant losses. We demonstrate that we can deterministically integrate positive and negative wavelength shifts on a single chip, validated on amorphous silicon carbide (a-SiC), silicon nitride (SiN) and silicon-on-insulator (SOI) platforms. We observe up to a 10-fold improvement of the thermo-optic tunability and, in addition, demonstrate athermal ring resonators with shifts as low as 1.5 pm/°C. This enables the fabrication of a novel tunable coupled ring optical waveguide (CROW) requiring only a single heater. In addition, the low-temperature deposition of our silicon dioxide cladding can be combined with lift-off to isolate the optical devices resulting in a decrease in thermal crosstalk by at least two orders of magnitude. Our method paves the way for novel photonic architectures incorporating bidirectional thermo-optic tunability.

Efficient thermo-optic micro-ring phase shifter made of PECVD silicon-rich amorphous silicon carbide

High thermo-optic tunability in PECVD silicon-rich amorphous silicon carbide

Efficient and compact thermo-optic phase shifter in silicon-rich silicon nitride

High-efficiency Thermo-Optic Phase Shifter with Segment Heating Electrodes Based on High Index Contrast Silicon Oxide Waveguide

Efficient, Compact and Low Loss Thermo-Optic Phase Shifter in Silicon

Optically Tuneable Microwave-Photonic Phase Shifter Based on Silicon Microring Resonator

Nonvolatile Tunable Silicon-Carbide-based Midinfrared Thermal Emitter Enabled by Phase-Changing Materials.

Highly integrated 3×3 silicon thermo-optical switch using a single combined phase shifter for optical interconnects.

Magic silicon dioxide for widely tunable integrated photonics

Photothermal Switching Based on Silicon Mach–Zehnder Interferometer Integrated with Light Absorber

Thermally Switchable/tunable Photonic Integrated Devices on Silicon

Fast Thermo-Optical Modulators with Doped-Silicon Heaters Operating at 2 Μm.

Magnetron-sputtered and Thermal-Evaporated Low-Loss Sb-Se Phase-Change Films in Non-Volatile Integrated Photonics

High-quality amorphous Silicon Carbide for hybrid photonic integration at low temperature

Design and Performance Analysis of Silica-Based Thermo-Optical Switches Operating in O-Band and C-Band

A Tunable Silicon Ring Reflector

A Tunable Broadband Photonic RF Phase Shifter Based on a Silicon Microring Resonator

Single nanowire thermo optic modulator based on Varshni shift

Submilliwatt Silicon Nitride Thermo-Optic Modulator Operating at 532 nm

Low-Power And High-Speed Thermo-Optic Switch Using Hybrid Silica/Polymer Waveguide Structure: Design, Fabrication And Measurement

Power-Efficient Silicon Nitride Thermo-Optic Phase Shifters for Visible Light