Power-Efficient Silicon Nitride Thermo-Optic Phase Shifters for Visible Light

Zheng Yong,Hong Chen,Xianshu Luo,Alperen Govdeli,Hongyao Chua,Saeed S. Azadeh,Andrei Stalmashonak,Guo-Qiang Lo,Joyce K.S. Poon,Wesley D. Sacher
DOI: https://doi.org/10.1364/OE.448614
2021-11-16
Abstract:We demonstrate power-efficient, thermo-optic, silicon nitride waveguide phase shifters for blue, green, and yellow wavelengths. The phase shifters operated with low power consumption due to a suspended structure and multi-pass waveguide design. The devices were fabricated on 200-mm silicon wafers using deep ultraviolet lithography as part of an active visible-light integrated photonics platform. The measured power consumption to achieve a $\pi$ phase shift (averaged over multiple devices) was 0.78, 0.93, 1.09, and 1.20 mW at wavelengths of 445, 488, 532, and 561 nm, respectively. The phase shifters were integrated into Mach-Zehnder interferometer switches, and $10- 90$\% rise(fall) times of about 570(590) $\mu$s were measured.
Optics,Applied Physics
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