Determination of the Barrier Height of Iridium with Hydrogen-Terminated Single Crystal Diamond

Wang Yan-Feng,Wang Wei,Chang Xiaohui,Wang Juan,Fu Jiao,Zhu Tianfei,Liu Zongchen,Liang Yan,Zhao Dan,Liu Zhangcheng,Zhang Minghui,Taiyuan University of Science and Technology,Wang Hong-Xing,Wang Ruozheng
DOI: https://doi.org/10.1557/mrc.2019.20
2019-01-01
MRS Communications
Abstract:Direct determination of barrier height (Φ BH ) value between Ir and single crystal (001) hydrogen-terminated diamond with lightly boron doped has been performed using x-ray photoelectron spectroscopy technique. 70 nm Ir islands were formed on hydrogen-terminated diamond surface using anodic aluminum oxide. The Φ BH value for lr/hydrogen-terminated diamond was -0.43 ± 0.14 eV, indicating that Ir was a suitable metal for ohmic contact with hydrogen-terminated diamond. The band diagram of lr/hydrogen-terminated diamond was obtained. The experimental Φ BH was compared with the theoretical Φ BH in this work.
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