Ohmic Contact Between Iridium Film And Hydrogen-Terminated Single Crystal Diamond

Yan-Feng Wang,Xiaohui Chang,Shuoye Li,Dan Zhao,Guoqing Shao,Tianfei Zhu,Jiao Fu,Pengfei Zhang,Xudong Chen,Fengnan Li,Zongchen Liu,Shuwei Fan,Renan Bu,Feng Wen,Jingwen Zhang,Wei Wang,Hong-Xing Wang
DOI: https://doi.org/10.1038/s41598-017-09380-1
IF: 4.6
2017-01-01
Scientific Reports
Abstract:Investigation of ohmic contact between iridium (Ir) film and hydrogen-terminated single crystal diamond has been carried out with annealing temperature from 300 to 600 degrees C in argon (Ar) and hydrogen ambient. Electrodes were deposited on hydrogen-terminated single crystal diamond by electron beam evaporation technique, and specific contact resistivity has been measured by transmission line model. The interface between Ir film and hydrogen-terminated single crystal diamond was characterized by transmission electron microscopy and energy dispersive X-ray spectroscopy. Theoretical calculation value of barrier height between Ir film and hydrogen-terminated single crystal diamond was around -1.1 eV. All results indicate that an excellent ohmic contact could be formed between Ir film and hydrogen-terminated single diamond.
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