Abstract:A thermal wind sensor utilizes the fact that airflow over a heated plate will cool it asymmetrically, with the upstream part of the plate being cooled more than the downstream part. In the temperature-balanced (TB) mode, the heating power may be distributed spatially in the sensor such that any flow-induced temperature gradient is cancelled. Information about the airflow can be extracted in the distribution of heating power in the sensor. Ideally, the influence of changes in the ambient temperature on the sensor’s output can be eliminated if in the whole measurement range the temperature sensor sensitivities are equal. However, because of the temperature dependency of the material properties of the airflow and the sensor, it may have a temperature drift. This paper, for the first time, investigates temperature effects of the ceramic microelectromechanical system (MEMS) thermal wind sensor based on the TB mode. The sensor consists of four outlying heaters and four inlying thermistors in two orthogonal directions on a ceramic substrate. When working in the TB mode, it could measure wind speed and wind direction by applying a power difference on the upstream and downstream heaters, so that the flow-induced temperature gradient is eliminated. Theoretical analysis has been developed which takes the variations of thermophysical properties in the sensor and the control circuits into account. Experiments for testing wind speed and direction have been performed in a wind tunnel with an adjustable ambient temperature. It shows that the wind speed is linearly influenced by the ambient temperature while the wind direction is inherently unaffected by ambient temperature variations. After compensation, the sensor shows a credible performance with an error of less than ±1m/s in wind speed and ±2° in wind direction in a temperature range from 0 °C to 30 °C.

Sensitivity Analysis of Micromachined Thermal Wind Sensor Based on Back Surface Sensing Mode

Linearity and Sensitivity Analysis of MEMS Thermal Wind Sensor via Analytical Model

Modelling and Characterization of a Robust, Low-Power and Wide-Range Thermal Wind Sensor

Sensitivity Improvement of a 2D MEMS Thermal Wind Sensor for Low-Power Applications

Design and Testing of a Micro Thermal Sensor for Non-Contact Surface Defect Detection.

Temperature Effects of a Ceramic MEMS Thermal Wind Sensor Based on a Temperature-Balanced Mode

Thermal wind sensor fabricated on low thermal conduction substrate

Drie Trenches And Full-Bridges Design For Sensitivity Improvement Of Mems Silicon Thermal Wind Sensor

Modeling of Temperature Effects on Micromachined Silicon Thermal Wind Sensors

Effect of Insulation Trenches on Micromachined Silicon Thermal Wind Sensors

Development of A Self-Packaged 2d Mems Thermal Wind Sensor for Low Power Applications

Octagon-Shaped 2-D Micromachined Thermal Wind Sensor for High-Accurate Applications

2-D Micromachined Thermal Wind Sensors—A Review

Analytic Model of Dual-Layer-Structure MEMS Thermal Wind Sensor with Increased Sensitivity

Experiment Of The Mems Wind Sensor Based On Temperature-Balanced Mode

A Self-Packaged Self-Heated Thermal Wind Sensor with High Reliability and Low Power Consumption

Design of a 2D Thermal Wind Sensor Based on MEMS Process

Research on Dust Effect for MEMS Thermal Wind Sensors

A Self-Packaged Two-Dimensional Thermal Wind Sensor Based on Thermopiles for Low Cost Applications

Thermal Analysis of a Micro Shear-Stress Sensor

Sensitivity Improvement Of Mems Thermal Wind Senor Using Vertical Stacking Thermistors