High Voltage Lateral Bidirectional Super Junction IGBT with Fast Turn-off Speed

Jinping Zhang,Qian Zhao,Kang Wang,Yang Zhao,Zehong Li,Zhaoji Li,Bo Zhang
DOI: https://doi.org/10.1109/icsict.2018.8565672
2018-01-01
Abstract:A novel lateral bidirectional super junction IGBT (LBSJ-IGBT) is proposed for the first time, which features a folded SJ structure with symmetrical N-buffer layer in the drift region. The relationships of breakdown voltage (BV), on-state voltage drop (V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">on</sub> ) as well as turn-off characteristics with device parameters are analyzed and simulated. The results show that the LBSJ-IGBT with BV of 668V, V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">on</sub> of 1.40V @J <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">on</sub> =100A/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> , turn-off loss (E <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">off</sub> ) of 3.62mJ/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> and fall time (t <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">f</sub> ) of 14ns in both directions is obtained only with the cell pitch of 24μm. To the best of our knowledge, this is the first result to demonstrate a >600V high speed lateral bidirectional IGBT device.
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