Effect of Ar/O2 Ratio on Structure and Cationic Distribution of Mn1.56Co0.96Ni0.48O4±δ Spinel Films

Qin Shi,Wei Ren,Xiaobo Zhang,Wenwen Kong,Bo Gao,Lei Wang,Jinbao Xu,Aimin Chang,Liang Bian
DOI: https://doi.org/10.1016/j.apsusc.2017.01.288
IF: 6.7
2017-01-01
Applied Surface Science
Abstract:Mn1.56Co0.96Ni0.48O4 +/-delta spinel oxide thin films have been prepared on thermally oxidized Si (100) substrates by firstly sputtering a Mn-Co-Ni alloy target under different oxygen partial pressures and then annealing at 750 degrees C in air. The results show that the film crystallinity is improved and the cationic distribution is varied by the increase of the oxygen partial pressures: Co2+ increases with the decrease of Co3+ and Mn4+ increases with the decrease of Mn2+ and Mn3+ ion. (C) 2017 Elsevier B.V. All rights reserved.
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