High B Value Mn-Co-Ni Spinel Films on Alumina Substrate by RF Sputtering

Qin Shi,Wei Ren,Wenwen Kong,Bo Gao,Lei Wang,Chao Ma,Aimin Chang,Liang Bian
DOI: https://doi.org/10.1007/s10854-017-6742-8
2017-01-01
Journal of Materials Science Materials in Electronics
Abstract:A series of Mn–Co–Ni–O spinel oxide films showing negative temperature coefficient were successfully deposited on alumina ceramic substrates by RF sputtering procedure. All films showed a poly-crystalline spinel structure. For an Ar:O2 ratio of 10:0, the deposited film showed the highest grow rate and a two-layer-structured Mn–Co–Ni–O spinel film was formed. The high performance of the MCN thin film is testified by a room temperature resistance of 4.16 MΩ, a B value of 5999 K and activation energy of 0.52 eV. These improvements are meaningful, especially concerning industrial applications.
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