Abstract:In this paper, the basic principle, details of fabricating process and measuring results were described for a polymer/Si arrayed waveguide grating (AWG) multiplexer around the central wavelength of 1.550 micron with the wavelength spacing of 1.6nm. The fluorinated polymer was used to fabricate AWG to reduce the optical loss, but the fluorinated material was expensive, so we initially adopted the polymer of polymethylmethacrylate(PM MA) type to go on technologic research. The regulated curve of refractive index was given for the core polymer. In order to obtain better shape of the waveguide after the reactive ion etching (RIE) using oxygen, an aluminum film as mask was used on polymer instead of conventional photoresist as mask. In order to reduce radiation loss of undercladding layer to Si substrate, the undercladding layer thickness was increased to 11 micron through two times of spin-coating, thus the radiation loss was reduced to the order of 0.001dB. The measuring results indicates fabricated optical waveguide achieved single-mode transmission.

Research on Technology of Polymer 9×9 Arrayed Waveguide Grating Multiplexer

Optimization of Polymer-Arrayed Waveguide Grating Multiplexer

Fabricated Technology for Polymer/si Arrayed Waveguide Grating

Optimization and fabrication of a polymeric arrayed-waveguide grating multiplexer

Parameter Optimization of a 9 × 9 Polymer Arrayed Waveguide Grating Multiplexer

Arrayed Waveguide Grating Multiplexer with High Thermal Stability on Silicon

Performance Analysis of a Polymer/silicon Arrayed Waveguide Grating

Design and fabrication of arrayed waveguide grating using fluoropolymer PFS-co-GMA

Polymeric 1×32 arrayed waveguide grating multiplexer using cross-linkable fluorinated poly (ether ether ketone) at 1550nm

Polymeric Flat Focal Field Arrayed Waveguide Grating Using Electron-Beam Direct Writing

Analysis of Transmission Characteristics of Polymer Arrayed Waveguide Grating Multiplexer

Polymer Arrayed Waveguide Grating with Box-Like Spectral Response

Design and Fabrication of a Polymeric Flat Focal Field Arrayed Waveguide Grating.

Effect of reactive ion etching process on simulation of polymeric arrayed waveguide grating multiplexers

Athermal Silicon Arrayed Waveguide Grating With Polymer-Filled Slot Structure

Parameter Optimization And Structural Design Of Polymer Arrayed Waveguide Grating Multiplexer

32-channel arrayed waveguide grating multiplexer using low loss fluorinated polymer operating around 1550nm

Fabrication of a 17×17 Polymer Arrayed Waveguide Grating with Flat Spectral Response

33 × 33 Arrayed Waveguide Grating Multiplexer Using Fluoropolymer PFS-co-GMA

Suppression of Polarization Dependence in the Design of a 11×11 Polymer/Si Arrayed Waveguide Grating

Analysis of diffraction characteristics for arrayed-waveguide grating multiplexer