Abstract:In this paper, the basic principle, details of fabricating process and measuring results were described for a polymer/Si arrayed waveguide grating (AWG) multiplexer around the central wavelength of 1.550 micron with the wavelength spacing of 1.6nm. The fluorinated polymer was used to fabricate AWG to reduce the optical loss, but the fluorinated material was expensive, so we initially adopted the polymer of polymethylmethacrylate(PM MA) type to go on technologic research. The regulated curve of refractive index was given for the core polymer. In order to obtain better shape of the waveguide after the reactive ion etching (RIE) using oxygen, an aluminum film as mask was used on polymer instead of conventional photoresist as mask. In order to reduce radiation loss of undercladding layer to Si substrate, the undercladding layer thickness was increased to 11 micron through two times of spin-coating, thus the radiation loss was reduced to the order of 0.001dB. The measuring results indicates fabricated optical waveguide achieved single-mode transmission.

Arrayed Waveguide Grating Multiplexer with High Thermal Stability on Silicon

Polymeric 1×32 arrayed waveguide grating multiplexer using cross-linkable fluorinated poly (ether ether ketone) at 1550nm

Performance Analysis of a Polymer/silicon Arrayed Waveguide Grating

Athermal Silicon Arrayed Waveguide Grating With Polymer-Filled Slot Structure

32-channel arrayed waveguide grating multiplexer using low loss fluorinated polymer operating around 1550nm

Fabricated Technology for Polymer/si Arrayed Waveguide Grating

Optimization of Polymer-Arrayed Waveguide Grating Multiplexer

Optimization and fabrication of a polymeric arrayed-waveguide grating multiplexer

Design and fabrication of arrayed waveguide grating using fluoropolymer PFS-co-GMA

33 × 33 Arrayed Waveguide Grating Multiplexer Using Fluoropolymer PFS-co-GMA

Parameter Optimization And Structural Design Of Polymer Arrayed Waveguide Grating Multiplexer

Analysis of Transmission Characteristics of Polymer Arrayed Waveguide Grating Multiplexer

Analysis of diffraction characteristics for arrayed-waveguide grating multiplexer

Turning-Mirror-Integrated Arrayed-Waveguide Gratings on Silicon-on-Insulator

Design and fabrication of 1 × 32 silica-based arrayed waveguide grating

High-performance Silicon Arrayed-Waveguide Grating (de)multiplexer with 0.4-Nm Channel Spacing

Slot-based Athermal Silicon Arrayed-Waveguide Grating (AWG)

Ultra-compact arrayed waveguide grating triplexer based on silicon-on-insulator platform

Design and Fabrication of 8×8 Silica-Based Arrayed Waveguide Grating

Compact Arrayed-Waveguide Grating on Silicon-On-Insulator with Integrated Waveguide Turning Mirrors