Abstract:In this paper, the basic principle, details of fabricating process and measuring results were described for a polymer/Si arrayed waveguide grating (AWG) multiplexer around the central wavelength of 1.550 micron with the wavelength spacing of 1.6nm. The fluorinated polymer was used to fabricate AWG to reduce the optical loss, but the fluorinated material was expensive, so we initially adopted the polymer of polymethylmethacrylate(PM MA) type to go on technologic research. The regulated curve of refractive index was given for the core polymer. In order to obtain better shape of the waveguide after the reactive ion etching (RIE) using oxygen, an aluminum film as mask was used on polymer instead of conventional photoresist as mask. In order to reduce radiation loss of undercladding layer to Si substrate, the undercladding layer thickness was increased to 11 micron through two times of spin-coating, thus the radiation loss was reduced to the order of 0.001dB. The measuring results indicates fabricated optical waveguide achieved single-mode transmission.

Fabrication of a 17×17 Polymer Arrayed Waveguide Grating with Flat Spectral Response

Polymer Arrayed Waveguide Grating with Box-Like Spectral Response

Design and fabrication of arrayed waveguide grating using fluoropolymer PFS-co-GMA

Fabrication of 17×17 Box-Like Spectral Response of an Arrayed Waveguide Grating

Fabrication of 17 × 17 Polymer/si Arrayed Waveguide Grating with Flat Spectral Response Using Steam-Redissolution Technique

Design and Fabrication of a Polymeric Flat Focal Field Arrayed Waveguide Grating.

Silica-Based Arrayed Waveguide Grating With Flattened Spectral Response Using A Multimode Interference Coupler

Arrayed Waveguide Grating Multiplexer with Boxlike Spectral Response

Polymeric Flat Focal Field Arrayed Waveguide Grating Using Electron-Beam Direct Writing

Design and Fabrication of 8×8 Silica-Based Arrayed Waveguide Grating

Analysis for Passband Flatness of Arrayed Waveguide Grating Multiplexer

Design and fabrication of 1 × 32 silica-based arrayed waveguide grating

Box-like spectral response of arrayed waveguide grating multiplexers

Performance Analysis of a Polymer/silicon Arrayed Waveguide Grating

Fabricated Technology for Polymer/si Arrayed Waveguide Grating

Athermal Silicon Arrayed Waveguide Grating With Polymer-Filled Slot Structure

Optimization of Polymer-Arrayed Waveguide Grating Multiplexer

33 × 33 Arrayed Waveguide Grating Multiplexer Using Fluoropolymer PFS-co-GMA

Effect of reactive ion etching process on simulation of polymeric arrayed waveguide grating multiplexers

Simulation and design for an arrayed-waveguide grating made of flourinated polymers

Polymeric 1×32 arrayed waveguide grating multiplexer using cross-linkable fluorinated poly (ether ether ketone) at 1550nm