Optical Multi-Mode Interference Power Splitter in GaAs Fabricated by Preferential Etching

MA Hui-lian,YANG Jian-yi,LI Jin,WANG Ming-hua
DOI: https://doi.org/10.3969/j.issn.1005-8788.2000.05.010
2000-01-01
Abstract:A multi-mode interference (MMI) GaAs 1×4 optical p ower splitter that can be directly coupled with single mode fiber array was fabr icated through optimized structure design and preferential etching. The 1.3 μm He-Ne laser measurement indicated that the device has basically realized the re quirement of uniform power splitting, the power imbalance is 0.155 dB.
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