<title>GaAs 1x4 optical power splitter</title>

Jianyi Yang,Minghua Wang
DOI: https://doi.org/10.1117/12.317987
1998-01-01
Abstract:In this paper, an optical power splitter based on MMI coupler in GaAs/GaAlAs heterostructure materials is fabricated. The epitaxial materials are grown by MBE. The dry etching process is applied to fabricate the ribs in this device. The measuring results are presented.
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