Surface Reaction Mechanism on GaN MOVPE Growth

XIN Xiao-long,ZUO Ran,TONG Yu-zhen,ZHANG Guo-yi
DOI: https://doi.org/10.3788/fgxb20153607.0744
2015-01-01
Abstract:Surface initial growth process of GaN film in MOVPE is studied by DFT theory of quan-tum chemistry. By calculating the adsorption energies of GaCH3 and NH3 at main adsorption sites of GaN (0001)-Ga surface, it is found that energies of GaCH3 at four adsorption sites are similar, thus GaCH3 is easy to diffuse on the surface. The energies of NH3 at four adsorption sites are much differ-ent. The most stable adsorption site for NH3 is Top, and the large energy barrier exist for NH3 migra-ting from Top to other sites. Based on the energy analysis, the initial GaN surface growth mechanism is proposed for GaN (0001)-Ga surface, with NH3 and GaCH3 as growth precursor and ring struc-tured core as final form. In the process of the ring structured core growth, the first GaN core growth need three NH3 and one GaCH3 , which can be expressed as Ga ( NH2 ) 3 . The second GaN core growth can use one existing N as coordination atom, so only two NH3 and one GaCH3 are needed. The two GaN core can be expressed as ( NH2 ) 2 Ga-NH-Ga ( NH2 ) 2 . The third GaN core growth can use two existing N as coordination atoms, so only one NH3 and one GaCH3 are needed. The third GaN core forms a ring structure which can be expressed as Ga3(NH)3(NH2)3. The subsequent growth will repeat the process of the second and third core growth, so as to realize the continuous steps of GaN film growth.
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