Research and Manufacture of Lamp-House of Micro-Beam of Ultraviolet Light in Micro Stereo Photo Lithography

王翔,沈连官,胡玉禧,赵钢,李川奇,潘微燕,刘群策
DOI: https://doi.org/10.3321/j.issn:1002-1582.2001.05.022
2001-01-01
Optical Technique
Abstract:The theory of stereo photo lithography and the key points of the applications of MSPL in micro fabrication field are briefly introduced Take economical high voltage spherical mercury arc lamp as the luminant of lamp house Though the synthetic analysis of the structure of the focus system, the ability to gather light, the way to transmit beam, the transmitting beam energy efficiency, the micro beam imaging property and transmitting beam character, the design is optimized Choosing two plano convex lens as focus system, using fiber to transmit beam, and using object lens of microscope, the lamp house of micro beam of ultraviolet light has been manufactured The lamp house can generate micro facula with several microns diameter It has been applying to the research of micro structure manufacturing of Micro Stereo Photo Lithography
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