A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing

Xiaochen Liu,Lihao Wang,Yinfang Zhu,Junyuan Zhao,Jinying Zhang,Jinling Yang,Fuhua Yang
DOI: https://doi.org/10.1088/1361-6439/aad927
2018-01-01
Journal of Micromechanics and Microengineering
Abstract:This work presents a novel scanning force microscopy probe with electro-thermal actuation and piezo-resistive detection. The fabricated probe of 270 x 58 x 2.5 mu m(3) can generate a force between 1.05 mu N and 16.52 mu N with a resolution of nano-newton, and can detect the nanometer-scale deflection. The minimum detectable output signal of the probe could be down to 20 mu V and the sensitivity reaches 4.92 mV mu m(-1). This is a straight-forward technique for characterizing the mechanical properties of micro/nano-structures and devices.
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