Characterization of qPlus probe for atomic force microscopy using scanning electron microscopy

Yu-chen XIE,Ke-bei CHEN,Zheng-hui LIU,Jia-fan CHEN,Hai-jian ZHONG,Chun-yu ZHANG,Wen-tao SONG,Geng-zhao XU,Ke XU

DOI: https://doi.org/10.3969/j.issn.1000?6281.2018.03.010

2018-01-01

Abstract:Atomic force microscopes equipped with qPlus probes exhibit higher spatial resolution, but the working mechanism is different from that of the traditional cantilever probes. Their structures are more complicated. The amplitude and direction of mechanical vibration of probe tips are of great importance to the experimental results. In experiments, the vibration modes are usually characterized by measuring the piezoelectric current from the tuning fork with a lock?in amplifier, but not the mechanical vibration of the tip itself. In this paper, we present a real?time method to observe the vibration state of qPlus probe in real space by scanning electron microscope. The vibration amplitude and direction of tip apex can be directly measured from SEM images. The amplitude and excitation voltage show a good linear relationship, which is in line with the theoretical expectation. The mechanical resonance frequency of the tip vibration is consistent with the resonance frequency of the piezoelectric current. However, the vibration direction in our experiments is almost parallel to the prong of the tuning fork. These results will benefit the structure design of qPlus probe and the improvement of their performance.