The Optical Property Improvement of GaAs Via Surface Passivation and Carriers Restriction of MgO Film

Dengkui Wang,Xue Liu,Xinwei Wang,Jilong Tang,Xuan Fang,Huimin Jia,Dan Fang,Chaoqun Li,Zhipeng Wei,Xiaohua Wang
DOI: https://doi.org/10.1080/00150193.2018.1454129
2018-01-01
Ferroelectrics
Abstract:Surface passivation is an effective way to eliminate the surface states and to improve the optical properties of GaAs. Moreover, carriers restriction of wide bandgap materials also is a path to enhance photoluminescence. In this paper, Be-doped GaAs epilayer was growth on GaAs substrate by molecular beam epitaxy. The MgO films were deposited by atom layer deposition. It was used as not only passivation layer to eliminate surface states, but also barrier layer to restrict carriers. The carriers restriction was confirmed by photoluminescence and current-voltage characteristics of metal-insulator-semiconductor structure. As the result, the photoluminescence intensity of Be-doped GaAs with 5nm MgO was 2.5 times higher than the bare Be-doped GaAs.
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