STUDY OF TO-LIKE MODE IN RAMAN-SPECTRA OF AMORPHOUS-SEMICONDUCTOR SUPERLATTICES

GX CHENG,KJ CHEN,XK ZHANG
1992-01-01
Chinese Physics
Abstract:A set of microstructure parameters, such as rms bond angle variation, average distortion energy per bond near the interface, stress near the interface and so on, have been obtained from the HWHM (Half Width at Half Maximum) of the TO-like mode and the positions of the peaks in Raman spectra of amorphous semiconductor superlattices (a-Si:H/a-SiN(x):H). Comparing two kinds of superlattices with different modulation parameters, one can further understand the microstructures of amorphous semiconductor superlattices.
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