Tool Vibration Spectrum Analysis in Ultra Precision Diamond Turning of Single Crystal Silicon

ZHANG Jian-guo,ZONG Wen-jun,SUN Tao
DOI: https://doi.org/10.3969/j.issn.1672-6030.2010.06.003
2010-01-01
Abstract:In order to monitor the brittle-ductile transition in diamond turning of single crystal silicon online and analyze the micro-deformation removal mode of the material,a series of experiments were carried out on the crystalline plane(100) of single crystal silicon with a rounded diamond cutting tool,and the relationship between the distribution of tool vibration spectrum and the cutting parameters was investigated in this paper,especially the variation rule of the tool vibration spectrum and mechanism of brittle-ductile transition.Experimental results indicate that the distribution of tool vibration spectrum is dependent on the contact mode between tool and silicon wafer,and the micro/nano removal mode of single crystal silicon.With the transition of single crystal silicon removal mode from brittle regime to ductile regime,the material removal mode transforms from the brittle fracture mode to plastic deformation characterized with shearing slide,and high frequency signals in the tool vibration spectrum and total energy of vibration both increase.Moreover,lower cutting velocity,greater cutting depth and larger feed rate will lead to more high frequency signals in the tool vibration spectrum and greater total energy of vibration in ductile regime cutting,because the dislocation can be carried out sufficiently in the micro shearing deformation zone of the material.Furthermore,the effects of cutting velocity,feed rate and cutting depth on the distribution of tool vibration spectrum decrease in turn,so that the application of reasonable cutting parameters can reduce the overall vibration of the cutting system.
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