Study on Piezoelectric Bimorphs Using PZT Thin Films Deposited by Hydrothermal Method

Li-qun DU,Yan L(U),Wei-jie DONG,Xiao-guang GAO
DOI: https://doi.org/10.3969/j.issn.1004-2474.2007.03.028
2007-01-01
Abstract:Piezoelectric bimorph fabricated by hydrothermal method is presented in the paper. In order to describe the characteristics of piezoelectric bimorph, properties of PZT film are studied by SEM and XRD. Cubic particles with average size of 5μm are found and the ratio of PbTiO3/PbZrO3 in PZT is about 53/47, which is around morphotropic phase boundary (MPB); Density is figured out through the datum measured in experiments. The model used to analyze the driving ability of bimorph, which is taken into account the effect of elastic intermediate layer, is set up. Piezoelectric coefficient d31 of PZT film is worked out using this model. Finally, the ferroelectric property of the bimorph is investigated and coercive voltage of the bimorph is obtained.
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