Study on the Single Point Optical Endpoint Detection

周国安,柳滨,王学军,种宝春
2008-01-01
Abstract:Basing on the optical interference theory,a single point optical endpoint detection was designed.The whole detection system sketch and processes were presented.Under the ideal conditions,to simulate the coherent angle and the reflection track of the single point optical endpoint detection.Educing the relationship between the reflectivity trace and the removal rate,to compare with mapping in actual conditions,proving the single point optical endpoint detection with a high precision by nine-point measurement way.Conjecture the optical sensor acquiring and dealing with data under the wafer adsorbed by carrier and swing by the set frequency.Under the movement in the composite conditions,the single point optical endpoint detection meets the accuracy requirement.
What problem does this paper attempt to address?