New Laser Drilling Technique for Making Via Holes on Alumina Substrates

郭栋,李龙土,蔡锴,桂治轮
DOI: https://doi.org/10.3969/j.issn.1001-2028.2003.03.015
2003-01-01
Abstract:Undesired spatters are often caused by laser-drilling process. A new gelcast green body laser-drilling technique is presented. With the technology, spatters are minimized and the holes on alumina boards drilled by Nd:YAG laser are irregular and fine.
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