A leak detection system for sealed devices with perfluorotributylamine

LV Gui-qiang,CHEN Xu,RONG Wei-gang,JIN Qi-ji
DOI: https://doi.org/10.13385/j.cnki.vacuum.2010.04.023
IF: 4
2010-01-01
Vacuum
Abstract:To meet the requirements that the leaking media out of the device is perfluorotributylamine,a leak detection system was developed with accumulation method.This detection system consists of a quadrupole mass spectrometer and sampling system.With the configuration,operating principle and calibration of the leak detection system described,the experiment results and customer’s applications revealed that the leak detection system for devices filled with perfluorotributylamine is feasible and reliable with a relative error less than 10%.
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