Current Conduction Mechanisms in H-Bn As a Dielectric Material

Zichao Ma,Clarissa Cyrilla Prawoto,Suwen Li,Zubair Ahmed,Lining Zhang,Mansun Chan
DOI: https://doi.org/10.1109/edssc.2018.8487119
2018-01-01
Abstract:We studied the electron conduction mechanisms in h-BN when it is used as a gate dielectric material for semiconductor devices. Experimental results show that electron hopping, in addition to Fowler Nordheim tunnelling, provide an extra conduction mechanism compared to traditional dielectric materials. Using density functional theory (DFT) based first principle calculation to examine the electronic structure in hBN layers with defects, the transition between the two different conducting mechanisms is identified.
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