Using Liquid Electrolytes in Dielectric Reliability Studies

Mario Lanza,Kechao Tang,Andrew C. Meng,Fei Hui,Yuanyuan Shi,Tingting Han,Trevor Petach,Charles Hitzman,Ai Leen Koh,David Goldhaber-Gordon,Paul C. McIntyre
DOI: https://doi.org/10.1109/ipfa.2018.8452552
2018-01-01
Abstract:In reliability studies, thin dielectric films are normally placed between two solid electrodes and a potential difference is applied, which produces local physical changes in the dielectric. However, studying such features is very complex due to the need of etching one of the solid electrodes. Here we show that liquid electrolytes can be used to study the reliability of thin dielectrics. Their main advantage is that after the electrical stress, the liquid can be rinsed, exposing the surface for direct characterization.
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