Abstract:An oxygen-zinc plasma and an oxygen-zinc-aluminum plasma are formed by pulsed laser ablation of a Zn target or pulsed laser co-ablation of a Zn target and an Al target in an electron cyclotron resonance (ECR) discharge-generated oxygen plasma for the deposition of ZnO and Al-doped ZnO (AZO) films. The plasmas are characterized spectroscopically by time-integrated and time-resolved optical emission spectroscopy. Both the oxygen-zinc plasma and the oxygen-zinc-aluminum plasma contain excited species originally present in the working O2 gas and energetic species ablated from the targets. The optical emission of the oxygen-zinc-aluminum plasma is abundant in the emission bands of oxygen molecular ions and the emission lines of mono-atomic oxygen, zinc and aluminum atoms and atomic ions. The time-integrated spectra as well as the time-resolved spectra of the plasma emission indicate that the oxygen species in the ECR oxygen plasma experience additional excitation by the expanding ablation plumes, and the ablated species are excited frequently when traveling accompanying the plume expansion in the oxygen plasma, making the formed plasma highly excited and very reactive, which plays an important role in the reactive growth of ZnO matrix and the in-situ doping of Al into the growing ZnO matrix. The deposited ZnO and AZO films were evaluated for composition analysis by energy dispersive X-ray spectroscopy, structure characterization by X-ray diffraction and optical transmission measurement. The deposited ZnO is slightly rich in O. The Al concentration of the AZO films can be controlled and varied simply by changing the repetition rate of the laser used for Al target ablation. Both the ZnO and the AZO films are featured with hexagonal wurtzite crystal structure and exhibit high optical transparency in a wide spectral region. Al doping results in an improvement in the ultraviolet transparency, a blue shift in the absorption edge and a widening of the band gap.

Research on Reducement of AZO Surface Plasma Loss Based on Composition Adjustment

Surface Topography and Optical Properties of Al-doped ZnO Thin Films by Sol-gel Process

Deposition and Characterization of AZO Thin Films on Flexible Glass Substrates Using DC Magnetron Sputtering Technique

Study on Aluminum Concentration on Optical and Electrical Properties of AZO Thin Films Fabricated by Ultrasonic Spray Pyrolysis

In-Situ Doping Preparation of Al-Doped Zno Films Via Pulsed Laser Co-Ablation of Zn and Al Targets with Assistance of Oxygen Plasma

Studies on Morphology, Electrical and Optical Characteristics of Al-doped ZnO Thin Films Grown by Atomic Layer Deposition

Tailoring of Optical and Electrical Properties of Transparent and Conductive Al-doped ZnO Films by Adjustment of Al Concentration

Spectroscopic characterization of the plasmas formed during the deposition of ZnO and Al-doped ZnO films by plasma-assisted pulsed laser deposition

Microstructure and Electrical Properties of Al-doped ZnO Thin Films

Optical Properties of Al-doped ZnO Thin Films by Ellipsometry

Effect of Film Thickness on Properties of Al-Doped Zno Film As Transparent Conducting Electrodes in Oleds

Optical Properties of Al-Doped ZnO Films in the Infrared Region and Their Absorption Applications

Preparation and Characterization of Al-doped ZnO Films and the Properties of the Composite Films with Ferroelectric Films

Tailoring the Morphology, Optical and Electrical Properties of DC-sputtered ZnO:Al Films by Post Thermal and Plasma Treatments

Preparation and characterization of high-transmittance AZO films using RF magnetron sputtering at room temperature

Preparation andphotoluminescence properties of AZO thin films deposited by ultrasonic spray pyrolysis method

Property Research of ZnO:Al Thin Films with Different Proportion of Al3+ Doping

Thickness Study of AZO Films by RF Sputtering in Ar + H2 Atmosphere at Room Temperature

Effect of aluminum doping on zinc oxide thin films grown by pulsed laser deposition for organic light-emitting devices

Spectroscopic Studies of the Plasma for the Preparation of Al-N Co-Doped ZnO Films

Infrared Emission Characteristic and Microwave Loss Property of Aluminum Doped Zinc Oxide Nanoparticles