Impact Resistance and Static Strength Analysis of an Extremely Simplified Micro Hotplate with Novel Suspended Film

Qi Liu,Yipin Wang,Jinyuan Yao,Guifu Ding
DOI: https://doi.org/10.1016/j.sna.2018.08.003
IF: 4.291
2018-01-01
Sensors and Actuators A Physical
Abstract:To improve mechanical strength of suspended micro hotplate, we proposed several innovative shapes of suspended films which were generated by different etching windows in this paper. Impact resistance and static strength are two important aspects of mechanical property. Half-sine acceleration load simulation was used to investigate impact resistance, and static load simulation was used to investigate static strength, proving better mechanical strength of design 5 and 6. Then, these micro hotplates were fabricated with less layers of Pt/Si3N4/SiO2 or Pt/SiO2 on Si substrate by the most simplified MEMS process flow. Drop tests proved that specimens could maintain intact even under the vibration load of 1000G. Micro force displacement test illustrated ultimate point loads that could be tolerated by these designs, thus revealing that the shape and material of suspended membrane would affect strength of the micro hotplate. The experimental results agree with simulation results, and prove that two new designs (design 5 and 6) have better mechanical strength than traditional suspended four-beam structure. (C) 2018 Elsevier B.V. All rights reserved.
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