Anneal Effect Of Er Doped Zinc Oxide By Spray Pyrolysis

Tsung-Mao Hsieh,Cheng-You Liu,Hsiang-Ming Huang,Che-Chi Lee,Wen-How Lan,Mu-Chun Wang,Jia-Ching Lin,Kuo-Jen Chang,Wen-Jen Lin
DOI: https://doi.org/10.1109/isne.2018.8394630
2018-01-01
Abstract:Zinc oxide thin films with and without erbium doping were prepared by spray pyrolysis with zinc chloride and erbium acetate precursors. Film thickness profile after 700 degrees C annealing process were analyzed. With the anneal time increase, rough and smooth surface were characterized for the ZnO and ZnO:Er samples respectively. The 10K photoluminescence were applied for the film characterization.
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