Abstract:The effectiveness of ultra-short pulsed laser radiation for high-precision material processing and surface micro-modification, owing to the minimal thermal and mechanical damage, has been shown. Micro/Nano structuring of thin films is gaining widespread importance owing to ever-increasing applications in a variety of fields. The present study details femtosecond laser interaction with ultra thin metallic films at the micro and nano scales. Results of Microablation studies, carried out with an 800nm wavelength, 80fs pulse duration, femtosecond laser focused tightly using a long working distance objective lens, are discussed. A parametric study of single shot ablation and subsequent atomic force microscope characterization of the ablation craters is presented. The formation of elevated convex hillock structures at low laser pulse energies and considerable delamination at higher energies evinces a stress driven modification mechanism. Further, nanostructuring results on thin films carried out with femtosecond laser in conjunction with an atomic force microscope are presented. Various nanofeatures were machined with high spatial resolution (∼10–12nm), flexibility and repeatability by utilizing the local field enhancement in the near-field of the scanning probe tip irradiated with the laser beam. Attempting to understand the modification mechanism and the physics involved, numerical simulation studies were performed to evaluate the field enhancement underneath the tip and the ‘femtosecond laser–thin film’ interaction dynamics in general. Possible applications of thin film structuring may be in the areas of high-resolution nanolithography, controlled nanodeposition, ultra high-density data storage, high-resolution mask production and repair, nanoelectronics, nanophotonics and various nanobiotechnology related applications.

Influence of Processing Parameters on the Structure Size of Microchannel Processed by Femtosecond Laser

Material Removal Effect of Microchannel Processing by Femtosecond Laser

Experimental Investigation on Processing of Fused Silica Microchannels by High Repetition Rate Femtosecond Laser

Theoretical and experimental analysis of the impact on ablation depth of microchannel milling using femtosecond laser

Experimental study on direct fabrication of micro channel on fused silica by picosecond laser

Thermal Diffusion and Thermal Melting in Femtosecond Laser Micromachining

Experimental Research on CO_2 Laser Direct-writing Machining PMMA Microchannel

Effects of Parameters in Femtosecond Laser Micromachining on Ablation of Silicon

Fabrication of millimeter-scale deep microchannels in fused silica by femtosecond laser filamentation effect

Shape Regulation of Tapered Microchannels in Silica Glass Ablated by Femtosecond Laser with Theoretical Modeling and Machine Learning.

An Experimental Investigation of the Effects of Femtosecond Laser Helical Drilling: Influence of Process Parameters

Thermal and Mechanical Limitations to Processing Resolution in Volume Non-Diffractive Ultrafast Laser Structuring

Effect of Laser Parameters in the Micromachining of Silicon by Femtosecond Pulse Laser

Study on the influence of Fs-laser power on the entrance morphology of vessel microfluidic chips

Processing Microstructure on Film by Femtosecond Laser

Femtosecond Laser Fabrication of Microchannels in Transparent Hard Materials

Insight on the regulation mechanism of the nanochannels in hard and brittle materials induced by sparially shaped femtosecond laser

Femtosecond Laser Microchannels Fabrication Based on Electrons Dynamics Control Using Temporally or Spatially Shaped Pulses

Process Research on Micro-Machining Diamond Microgroove by Femtosecond Laser

Prediction Model for Liquid-Assisted Femtosecond Laser Micro Milling of Quartz without Taper

Combined Experimental and Theoretical Study of Femtosecond Laser Based Micro/Nano Machining of Ultra Thin Metallic Films