Optical Fiber Based Microfluidic Gas Flowmeter

Yu Wang,Guofeng Yan,Ying Li,Sailing He
DOI: https://doi.org/10.1109/icocn.2017.8121201
2017-01-01
Abstract:A microfluidic gas flowmeter based on optical fiber Fabry-Perot interferometer(FPI) was proposed and demonstrated. The sensor was formed by two embedded optical fibers with a microfluidic gas channel running across the two end faces. The gas flowrate was first tested by monitoring the shift of the resonancewavelength of the FPI. The intensity demodulation method was then applied to investigate thedynamic response of the sensor, by utilizing a tunable laser and a photodiode.The experimental results show that our proposed microfluidic gas flowmeter has high sensitivity and fast response.
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