Abstract:Ultra-high-Q resonators are fundamentally important to optics and microwave photonics. Up to now, it is still very challenging to boost the Q factor while maintaining a compact size for a resonator. Herein, we proposed and demonstrated an ultra-high-Q silicon-nitride (Si3N4) racetrack resonator with uniform multi-mode Si3N4 photonic waveguides. It consists of two multi-mode straight waveguides connected by two multi-mode waveguide bends (MWBs). In particular, the MWBs are based on modified Euler curves, and a multi-mode straight waveguide directional coupler is used for the fundamental mode coupling and avoid exciting higher-order modes in the racetrack. In this way, the fundamental mode is excited and propagates in the multi-mode racetrack resonator with ultra-low loss. Meanwhile, it helps to achieve a compact 180° bend to reduce the chip footprint. In this paper, the propagation loss of the fundamental mode is significantly reduced with standard fabrication process by broadening the waveguides width to as wide as 3{\mu}m. Results show that an ultra-high-Q resonator with an intrinsic Q of TE mode is 4.57*10^7, and the corresponding propagation loss of the waveguide is only 1.80 dB/m. To the best of our knowledge, this is the highest Q value of the ring resonator with only 2.226 mm ring length reported so far. The proposed ultra-high-Q Si3N4 resonator can be used to microwave photonic filters and optoelectronic oscillators with large operation bandwidth.

Terahertz Integrated Device: High-Q Silicon Dielectric Resonators

Photonics-inspired Terahertz Whispering Gallery Mode Resonator Waveguide on Silicon Platform

Dry-etched Ultrahigh-Q Silica Microdisk Resonators on a Silicon Chip

High- Q Photonic Crystal Cavity in a Single-Mode Silicon Ridge Waveguide

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Mid-infrared high-Q germanium microring resonator

High-Q Mid-Infrared Chalcogenide Glass Resonators

Tunable high-quality Fano resonance in coupled terahertz whispering-gallery-mode resonators

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Passive Devices at 2 Μm Wavelength on 200 Mm CMOS-compatible Silicon Photonics Platform [Invited]

Ultrahigh-Q silicon racetrack resonators

A fully integrated high-Q Whispering-Gallery Wedge Resonator

Integrated Ultra-High-Q Optical Resonator

High-<i>Q</i> SH-SAW Resonator Using 36 YX-LiTaO<sub>3</sub> on SiC

Ultra-high-Q racetrack microring based on silicon-nitride

A High Q Substrate Integrated Waveguide Resonator for Microwave Sensing of Low Loss Materials

Low-loss silicon waveguide and an ultrahigh-Q silicon microring resonator in the 2?μm wave band

An Ultrahigh-Q Microresonator on 4H-silicon-carbide-on-insulator Platform for Multiple Harmonics, Cascaded Raman Lasing and Kerr Comb Generations

Investigation Of Nano Sic Resonator

Terahertz Monolithic Integrated Cavity Filter Based on Cyclic Etched SiC Via-Holes

Broadband high-Q multimode silicon concentric racetrack resonators for widely tunable Raman lasers