Abstract:Ultra-high-Q resonators are fundamentally important to optics and microwave photonics. Up to now, it is still very challenging to boost the Q factor while maintaining a compact size for a resonator. Herein, we proposed and demonstrated an ultra-high-Q silicon-nitride (Si3N4) racetrack resonator with uniform multi-mode Si3N4 photonic waveguides. It consists of two multi-mode straight waveguides connected by two multi-mode waveguide bends (MWBs). In particular, the MWBs are based on modified Euler curves, and a multi-mode straight waveguide directional coupler is used for the fundamental mode coupling and avoid exciting higher-order modes in the racetrack. In this way, the fundamental mode is excited and propagates in the multi-mode racetrack resonator with ultra-low loss. Meanwhile, it helps to achieve a compact 180° bend to reduce the chip footprint. In this paper, the propagation loss of the fundamental mode is significantly reduced with standard fabrication process by broadening the waveguides width to as wide as 3{\mu}m. Results show that an ultra-high-Q resonator with an intrinsic Q of TE mode is 4.57*10^7, and the corresponding propagation loss of the waveguide is only 1.80 dB/m. To the best of our knowledge, this is the highest Q value of the ring resonator with only 2.226 mm ring length reported so far. The proposed ultra-high-Q Si3N4 resonator can be used to microwave photonic filters and optoelectronic oscillators with large operation bandwidth.

Ultrahigh-Q silicon racetrack resonators

Ultra-high-Q racetrack microring based on silicon-nitride

Broadband high-Q multimode silicon concentric racetrack resonators for widely tunable Raman lasers

Tunable Microwave Photonic Filter Based on Ultra-High-q Silicon Racetrack-Resonator with a Large Free-Spectral Range

High-quality-factor Optical Microresonators Fabricated on Lithium Niobate Thin Film with an Electro-Optical Tuning Range Spanning over One Free Spectral Range [Invited]

Ultrahigh Q SOI Ring Resonator With Strip Waveguide

High- Q Photonic Crystal Cavity in a Single-Mode Silicon Ridge Waveguide

Compact Racetrack Resonator on LiNbO<sub>3</sub>

Design and Characterization of Q-enhanced Silicon Nitride Racetrack Micro-Resonators

Optical Bistability in a High-Q Racetrack Resonator Based on Small SU-8 Ridge Waveguides

Ultralow-Loss Silicon Photonics beyond the Singlemode Regime

422 Million intrinsic quality factor planar integrated all-waveguide resonator with sub-MHz linewidth

Fine-Resolution Silicon Photonic Wavelength-Selective Switch Using Hybrid Multimode Racetrack Resonators

Design and Fabrication of SU-8 Polymer-Based Micro-Racetrack Resonators

Single soliton microcombs based on optimized ultra-high Q Si3N4 optical microcavities

New-generation Ultra-Low Loss Silicon Photonic Waveguide and Devices

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Single-Mode Silicon-On-Insulator Elliptical Microdisk Resonators with High Q Factors

Compact Microracetrack Resonator Devices Based on Small SU-8 Polymer Strip Waveguides

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

Perpendicular Coupler for Standing Wave Excitation and Wavelength Selection in High-Q Silicon Microresonators