Epitaxial Stress-Free Growth of High Crystallinity Ferroelectric PbZr0.52Ti0.48O3 on GaN/AlGaN/Si(111) Substrate

Lin Li,Zhaoliang Liao,Nicolas Gauquelin,Minh Duc Nguyen,Raymond J. E. Hueting,Dirk J. Gravesteijn,Ivan Lobato,Evert P. Houwman,Sorin Lazar,Johan Verbeeck,Gertjan Koster,Guus Rijnders
DOI: https://doi.org/10.1002/admi.201700921
IF: 5.4
2018-01-01
Advanced Materials Interfaces
Abstract:Due to its physical properties gallium-nitride (GaN) is gaining a lot of attention as an emerging semiconductor material in the field of high-power and high-frequency electronics applications. Therefore, the improvement in the performance and/or perhaps even extension in functionality of GaN based devices would be highly desirable. The integration of ferroelectric materials such as lead-zirconate-titanate (PbZrxTi1-xO3) with GaN has a strong potential to offer such an improvement. However, the large lattice mismatch between PZT and GaN makes the epitaxial growth of Pb(Zr1-xTix)O-3 on GaN a formidable challenge. This work discusses a novel strain relaxation mechanism observed when MgO is used as a buffer layer, with thicknesses down to a single unit cell, inducing epitaxial growth of high crystallinity Pb(Zr0.52Ti0.48)O-3 (PZT) thin films. The epitaxial PZT films exhibit good ferroelectric properties, showing great promise for future GaN device applications.
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