An ultra-fast electrothermal micromirror with bimorph actuators made of copper/tungsten

Dingkang Wang,Xiaoyang Zhang,Liang Zhou,Mengyue Liang,Daihua Zhang,Huikai Xie

DOI: https://doi.org/10.1109/OMN.2017.8051478

2017-01-01

Abstract:This paper reports an ultra-fast electrothermal bimorph micromirror with an inverse-series-connected bimorph actuator, which is made up of Cu-W bimorph. This mirror has a high rotational resonant frequency of 12.8 kHz.

What problem does this paper attempt to address?

A Robust, Fast Electrothermal Micromirror With Symmetric Bimorph Actuators Made Of Copper/Tungsten

xiaoyang zhang,boxiao li,xingde li,huikai xie

DOI: https://doi.org/10.1109/transducers.2015.7181072

2015-01-01

Abstract:This paper reports a fast, robust electrothermal bimorph micromirror with a symmetric inverse-series-connected bimorph actuator. The actuator is made up of symmetric Cu-W bimorphs with high sensitivity and fast thermal response. A unique backside DRIE release process is developed to keep the mirror surface intact during release. The micromirror is able to perform both piston and tip-tilt motion. A maximum piston displacement of 169 mu m is achieved with lateral shift less than 1.5 mu m at the driving voltage of only 2.3 V. The maximum optical angle achieved is +/- 13 degrees at 2.3 V. This mirror gives fast thermal response of less than 7.5 ms. The resonances of the piston and tip-tilt modes are 1.58 kHz and 2.74 kHz, respectively.
A Fast, Large-Stroke Electrothermal Mems Mirror Based on Cu/W Bimorph

Xiaoyang Zhang,Liang Zhou,Huikai Xie

DOI: https://doi.org/10.3390/mi6121460

IF: 3.4

2015-01-01

Micromachines

Abstract:This paper reports a large-range electrothermal bimorph microelectromechanical systems (MEMS) mirror with fast thermal response. The actuator of the MEMS mirror is made of three segments of Cu/W bimorphs for lateral shift cancelation and two segments of multimorph beams for obtaining large vertical displacement from the angular motion of the bimorphs. The W layer is also used as the embedded heater. The silicon underneath the entire actuator is completely removed using a unique backside deep-reactive-ion-etching DRIE release process, leading to improved thermal response speed and front-side mirror surface protection. This MEMS mirror can perform both piston and tip-tilt motion. The mirror generates large pure vertical displacement up to 320 μm at only 3 V with a power consumption of 56 mW for each actuator. The maximum optical scan angle achieved is ±18° at 3 V. The measured thermal response time is 15.4 ms and the mechanical resonances of piston and tip-tilt modes are 550 Hz and 832 Hz, respectively.
An Electrothermal Micromirror with J-shaped Bimorph Microactuators

Liang Zhou,Dingkang Wang,Huikai Xie

DOI: https://doi.org/10.1109/omn.2019.8925056

2019-01-01

Abstract:A tip-tilt-piston micromirror with four J-shaped bimorph microactuators is developed to increase robustness and stability. The diameter of the central mirror plate is 1 mm and the footprint of the entire device is only 1.6 × 1.6 mm 2 . The micromirror scans 3° (optical) at 2.8 Vdc. The piston mode and rotation mode are measured at 880 Hz and 1555 Hz, respectively.
An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability.

Liang Zhou,Xiaoyang Zhang,Huikai Xie

DOI: https://doi.org/10.3390/mi10050323

IF: 3.4

2019-01-01

Micromachines

Abstract:This paper presents the design, fabrication, and characterization of an electrothermal MEMS mirror with large tip, tilt and piston scan. This MEMS mirror is based on electrothermal bimorph actuation with Cu and W thin-film layers forming the bimorphs. The MEMS mirror is fabricated via a combination of surface and bulk micromachining. The piston displacement and tip-tilt optical angle of the mirror plate of the fabricated MEMS mirror are around 114 μm and ±8°, respectively at only 2.35 V. The measured response time is 7.3 ms. The piston and tip-tilt resonant frequencies are measured to be 1.5 kHz and 2.7 kHz, respectively. The MEMS mirror survived 220 billion scanning cycles with little change of its scanning characteristics, indicating that the MEMS mirror is stable and reliable.
Research of an Adaptive Micro-Mirror Based on Micro-Opto-Electro-Mechanical- System

Saijun Lü,Dan Pei,Jian Bai,Xiyun Hou,Guoguang Yang

DOI: https://doi.org/10.3321/j.issn:0253-2239.2007.07.023

2007-01-01

Abstract:A novel adjustable focal-length optical adaptive micro-mirror based on bi-mental effect is presented. Compared with traditional deformable micro-mirror, micro-mirror fabricated by this method has the advantage of low driving voltage and large driving force. Besides, it is easy to be fabricated. Micro-machining processes such as oxygenation, photolithography, chemical etching and sputtering are experimented. A 4 × 4 bi-metal adjustable focal-length micro-mirror arrays have been completed. Each unit has an area of 3 mm × 3 mm with the thickness of silicon 60μm and aluminum film 150 nm. Deformable mirror area covers 79% of the total mirror area which is 100%. Dynamic performance of adjustable focal-length micro-mirror is tested using laser wave-front interferometer. Experiment results demonstrate that the micro-mirror can produce uni-directional continuous deformation with the maximum deformation of 15.8 and nonlinearity lag of 27%. It can work at 0-2.5 V with an adjustable focal length ranging from ∞ to 0.036 m.
Multi-Axis Electrothermal Scanning Micromirror with Low Driving Voltage

Kemiao Jia,Huikai Xie

DOI: https://doi.org/10.1109/cleo.2007.4452788

2007-01-01

Abstract:This paper presents the design, fabrication and measurement results of a multi-axis electrothermal micromirror. This micromirror employs unique bimorph actuators to achieve one-dimensional piston motion and two-dimensional rotation.
A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion

Shane T. Todd,Ankur Jain,Hongwei Qu,Huikai Xie

DOI: https://doi.org/10.1109/OMEMS.2005.1540059

2005-01-01

Abstract:A new electrothermal micromirror with large piston and tilt motions was proposed and fabricated. Large initial tilt angles and optical path shifting of previously fabricated thermal micro mirrors were eliminated by employing inverted-series-connected (ISC) bimorph actuators
Design and fabrication of 2D fast electrothermal micromirrors with large scan range and small center shift

Pal, S.,Huikai Xie

DOI: https://doi.org/10.1109/TRANSDUCERS.2011.5969768

2011-01-01

Abstract:We report an elliptical micromirror actuated by a curved electrothermal multimorph that bends and twists upon controlled Joule heating. The mirror plate is elliptical with 92 μm major axis and 142 μm minor axis. The micromirror has an optical scan angle of 22° at 0.37 V applied voltage or 9 mW power input. Mirror-center shift produced by multimorph bending and twisting compensate each other and is only 14.5 μm at an optical scan angle of 22°. The curved actuator shape maximizes chip-area utilization and ensures a high resonant frequency. The first three resonant modes are at 3.9 kHz, 8.6 kHz and 17 kHz. Two-dimensional (2D) optical scanning is demonstrated using the second and third resonant modes.
A Curved Multimorph Based Electrothermal Micromirror with Large Scan Range and Low Drive Voltage

Sagnik Pal,Huikai Xie

DOI: https://doi.org/10.1016/j.sna.2011.06.011

2011-01-01

Abstract:We report a circular micromirror with a 1mm aperture that has an optical scan range of 60° at 0.68V applied voltage and 11mW power input. The mirror is actuated by a semicircular aluminum (Al)–tungsten (W) electrothermal multimorph that bends and twists upon controlled Joule heating. W acts as an active layer of the multimorph and a resistive heater. The curved actuator design not only maximizes the efficiency of chip area usage, but also achieves high resonant frequency due to torsional stiffness encountered during beam deformation. The first three resonant modes of the micromirror are at 104Hz, 400Hz and 416Hz, respectively. Two-dimensional (2D) optical scanning is demonstrated by using the second resonant mode. The low power consumption may be attributed to the use of a single actuator beam. Mirror-center shift produced by actuator bending and twisting partially compensate each other and this results in 1.6 times lower center-shift compared to previously reported straight multimorph based designs. Device fabrication involves surface and bulk micromachining on an SOI wafer.
MEMS mirrors based on a curved concentric electrothermal actuator

lin liu,sagnik pal,huikai xie

DOI: https://doi.org/10.1016/j.sna.2012.03.021

2012-01-01

Abstract:A curved concentric electrothermal actuator has been designed and developed to actuate circular micromirrors with improved area efficiency, while at the same time achieving large scan range at low voltage. This actuator consists of three curved concentric Aluminum/Tungsten bimorphs for fast thermal response and high responsivity, and two rigid frames connected in between for scan range amplification. A tip–tilt–piston micromirror with a circular mirror plate based on this actuator design has been proposed and fabricated. The mirror is capable of scanning ±11° at 0.6V, and generating a 227μm piston displacement at only 0.8V. The measured lateral shift and tilt angle of the mirror plate are less than 7μm and 0.7°, respectively, through the entire piston displacement. A piston-only micromirror has also been demonstrated, and it has even smaller lateral shift of less than 3μm and tilt of less than 0.4° through the piston scan range. This mirror generates large vertical displacement of about 200μm at only 0.9V.
A process for fabricating robust electrothermal micromirrors with customizable thermal response time and power consumption

shankar pal,huikai xie

DOI: https://doi.org/10.1109/OMEMS.2011.6031066

2011-01-01

Abstract:A novel process for fabricating robust electrothermal bimorph based MEMS devices is reported and scanning electrothermal micromirrors are fabricated. Device parameters can be chosen to customize thermal response time and power requirements. Aluminum (Al) and Tungsten (W) form the active bimorph layers and polyimide is used for thermal isolation.
An Electrothermal Tip–Tilt–Piston Micromirror Based on Folded Dual S-Shaped Bimorphs

Kemiao Jia,Sagnik Pal,Huikai Xie

DOI: https://doi.org/10.1109/jmems.2009.2023838

IF: 2.829

2009-01-01

Journal of Microelectromechanical Systems

Abstract:This paper presents the design, optimization, fabrication, and test results of an electrothermally actuated tip-tilt-piston micromirror with a large optical aperture of 1 mm. The fabrication of the device is a combination of thin-film surface micromachining and bulk silicon micromachining based on silicon-on-insulator wafers. The device has 3-DOF of actuations, including rotations around two axes in the mirror plane, and out-of-plane piston actuation. The micromirror shows an optical scan range of plusmn30deg about both x- and y-axes and displaces 480 mum in the z-axis, all at dc voltages that are less than 8 V. Dynamic testing of the micromirror shows that the thermal response time of each actuator is about 10 ms. Resonant frequencies of the piston and rotation motion are 336 and 488 Hz, respectively. The unique structural design of the device ensures that there is no lateral shift for the piston motion and no rotation-axis shift for the rotation scanning. With the large tip-tilt-piston scan ranges and low driving voltage, this type of device is very suitable for biomedical imaging and laser beam steering applications.
A Large-Piston Scanning Electrothermal Micromirror with A Temperature Control Frame

Jiawen Luo,Zhiming Chen,Yingtao Ding,Qiao Chen,Jinling Ding,Jin Cheng,Huikai Xie

DOI: https://doi.org/10.1109/omn.2016.7565914

2016-01-01

Abstract:An electrothermal bimorph micromirror with integrated temperature control is presented. The central mirror plate position is controlled against the ambient temperature variation through a thermally-isolated frame with embedded Pt heaters and temperature sensors.
Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation

Haoran Wang,Xiaoyang Zhang,Daihua Zhang,Liang Zhou,Huikai Xie

DOI: https://doi.org/10.1109/OMN.2017.8051505

2017-01-01

Abstract:An electrothermal bimorph based MEMS mirror with large scan range, high fill factor and high resonant frequency is presented. A reliability issue due to burn-out of a bimorph thermal actuator is also studied and modeled.
A Multi-Degree-of-freedom Micromirror Utilizing Inverted-Series-connected Bimorph Actuators

Shane T. Todd,Ankur Jain,Hongwei Qu,Huikai Xie

DOI: https://doi.org/10.1088/1464-4258/8/7/s10

2006-01-01

Abstract:A novel multi-degree-of-freedom electrothermal micromirror design that uses thermal inverted-series-connected (ISC) bimorph actuators is presented. The ISC bimorph actuators eliminate problems observed in previous designs that use single bimorph actuators. The micromirror can operate in one-dimensional (1D) piston-mode and two-dimensional (2D) tilt-mode. Analytical models for the piston-mode and tilt-mode actuations are shown and are compared to FEM simulation results. The device was fabricated using the AMI 1.5 mu m CMOS (complimentary metal-oxide semiconductor) process followed by a post-CMOS micromachining process for device release. The displacement versus temperature of the micromirror was measured experimentally over a range of temperatures and compared to analytical and FEM simulation results. Experimental results showed that the micromirror displaced by 56 mu m at an applied temperature 150 degrees C. The integrated polysilicon heaters were open-circuited during the post-CMOS microfabrication. The failure was caused by pinholes in the metal layers that allowed etchants to attack the polysilicon layer during post-CMOS microfabrication.
MEMS mirrors based on curved concentric electrothermal actuators with very small lateral shift and tilt

Lin Liu,Pal, S.,Huikai Xie

DOI: https://doi.org/10.1109/TRANSDUCERS.2011.5969759

2011-01-01

Abstract:We present a curved concentric electrothermal actuator design that has very mall lateral shift and tilting. The actuator is made up of folded curved Al/W bimorphs with fast thermal response and high sensitivity. Two MEMS mirror designs based on this actuator design have been fabricated. The first MEMS mirror is a tip-tilt-piston scanning mirror capable of scanning up to ± 11° at voltage less than 0.6 V, and generating up to 227 μm piston displacement at less than 0.8 V. Through the entire piston motion, the lateral shift and the tilt angle of the mirror plate are less than 7 μm and 0.7°, respectively. The second MEMS mirror is a piston scanning mirror with enhanced symmetry, and less than 3 μm lateral shift and less than 0.4° tilt through the entire piston scan range have been achieved. This mirror gives large vertical displacement of about 200 μm at only 0.9 V.
Design and Microfabrication of an Electrostatically Actuated Scanning Micromirror with Elevated Electrodes

mohd haris,hongwei qu,ankur jain,huikai xie

2008-01-01

Abstract:This paper reports the design and microfabrication of an electrostatically actuated CMOS-MEMS micromirror with elevated electrodes. Two sets of bimorphs are employed to create mismatched vertical comb drives for mirror actuation. Device structural design and fabrication process are detailed and device performance such as scanning angles is simulated using CoventorWare, an integrated MEMS simulator. With a 26 V driving voltage applied to the mismatched comb drives alternately, a rotational angle of over +/- 12 degrees can be realized. The device chips were fabricated using AMI 0.5 mu m CMOS technology through MOSIS. DRIE post-CMOS microfabrication was performed for device release.
Low Crosstalk Electrothermal Micromirrors for High-speed Resonant Scanning

Teng Pan,Jiaan Jin,Hengzhang Yang,Xiaodan Mao,Qiangxian Qi,Qian Chen,Huikai Xie

DOI: https://doi.org/10.1109/omn61224.2024.10685243

2024-01-01

Abstract:Electrothermal micromirrors face challenges of irregular scanning patterns when operated near resonance, primarily due to significant mechanical crosstalk. This paper presents an innovative decoupled electrothermal micromirror, effectively minimizing cross-axis crosstalk by approximately 30 to 50 times at the resonant frequency via an eigenmode separation method.
A curvature-controllable, convex-mirror actuator based on carbon nanotube film composites

zhiwei zhou,luzhuo chen,changhong liu,shoushan fan

DOI: https://doi.org/10.1016/j.carbon.2015.09.107

IF: 10.9

2016-01-01

Carbon

Abstract:A novel round shape electrothermal actuator based on a bimorph structure with a cross-stacked superaligned carbon nanotube film and polydimethylsiloxane has been designed and fabricated. The coated silver film (100 nm thickness) makes the actuator surface like a mirror. Compared with common polymer nanocomposites based electrothermal actuators, our actuator exhibits a distinctive shape change. Due to the different coefficients of thermal expansion of the two material layers, it turns into a convex shape (a concave shape on the other surface) by using low electric field strengths such as < 200 V m−1. The curvature of the convex shape can be controlled by the voltage precisely. It can lift almost four times of its own weight. The cyclic actuation test shows the excellent stability of the actuator (over 2000 times). Owing to the advantages of low driving voltages, muscle-like responses, distinctive shape changes, mirror-like surface, stability, we think the novel actuator will have great potential usages in various applications, such as artificial muscles, optical devices, microsensors, microrobots, and so on.
A large rotational angle micromirror based on hypocycloidal electrothermal actuators for endoscopic imaging

Xiaojing Mu,Yingshun Xu,Singh, J.,Nanguang Chen

DOI: https://doi.org/10.1109/OMEMS.2010.5672202

2010-01-01

Abstract:The paper presents a large rotational angle micromirror base on hypocycloidal electrothermal actuators for circumferential endoscopic imaging. The micromirror consists of a double-side Cr/Au coated high reflective mirror plate (1mm by 0.8mm) laterally supported by two hypocycloidal electrothermal actuators on both sides (Fig. 1(a)). In our design, 1μm PVD Al deposited on 2μm single crystal silicon (SCS) forms a bimorph microstructure with the length of 800 μm and the width of 60μm. Four bimorph structures were staggerly connected in parallel to form a hypocycloidal electrothermal actuator. In this configuration, a metal layer was on a silicon backbone in one bimorph structure while the metal layer was deposited below the silicon backbone in adjacent bimorph structures (Fig. 1(b)). Since the radius of curvature of each bimorph structure is the same, the deflection of each structure is the same. Hence the rotational axis keeps still and there is no lateral shifting effect. Simulations via finite element analysis (FEA) show that the mechanical deflection angle of a micromirror significantly increases by using this actuator design. 141.2° was found in the design with fully double-side Al coated actuators (Fig. 2(a, b)) and 68.6° was found in the design with only frontside Al coated actuators (Fig. 2(c, d)). Micromirrors were fabricated by a post-CMOS MEMS process on 8 inches SOI wafers. An optical microscopic image and a scanning electron microscope (SEM) micrograph of a released micromirror are shown in Fig. 3(a) and (b), respectively. However, so far we have not successfully patterned Al layer below the SCS layer as part of the actuator and therefore only micromirrors equipped by frontside Al coated actuators were experimentally characterized (Fig. 4). ~35° mechanical deflection was achieved by 2.6 V DC input voltage (Fig. 5). It has a discrepancy in comparison in comparison with the FEA simulation. -3dB cutoff f- - requency was found to be about 29 Hz as the large signal frequency response (Fig. 5). Current-voltage relationship of an electrothermal actuator is also shown in Fig. 5. A series of frames from a video of a switching micromirror shows various tilting angles of the micromirror under a sinusoidal drive signal with the amplitude of 2.6 V was still with absence of microstructures with backside Al coated, the concept of achieving large deflection angle by using hypocycloidal electrothermal actuators has been demonstrated. Both FEA simulation and experimental results prove the capability of the Single-axis rotational micromirror device.

An ultra-fast electrothermal micromirror with bimorph actuators made of copper/tungsten

A Robust, Fast Electrothermal Micromirror With Symmetric Bimorph Actuators Made Of Copper/Tungsten

A Fast, Large-Stroke Electrothermal Mems Mirror Based on Cu/W Bimorph

An Electrothermal Micromirror with J-shaped Bimorph Microactuators

An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability.

Research of an Adaptive Micro-Mirror Based on Micro-Opto-Electro-Mechanical- System

Multi-Axis Electrothermal Scanning Micromirror with Low Driving Voltage

A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion

Design and fabrication of 2D fast electrothermal micromirrors with large scan range and small center shift

A Curved Multimorph Based Electrothermal Micromirror with Large Scan Range and Low Drive Voltage

MEMS mirrors based on a curved concentric electrothermal actuator

A process for fabricating robust electrothermal micromirrors with customizable thermal response time and power consumption

An Electrothermal Tip–Tilt–Piston Micromirror Based on Folded Dual S-Shaped Bimorphs

A Large-Piston Scanning Electrothermal Micromirror with A Temperature Control Frame

Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation

A Multi-Degree-of-freedom Micromirror Utilizing Inverted-Series-connected Bimorph Actuators

MEMS mirrors based on curved concentric electrothermal actuators with very small lateral shift and tilt

Design and Microfabrication of an Electrostatically Actuated Scanning Micromirror with Elevated Electrodes

Low Crosstalk Electrothermal Micromirrors for High-speed Resonant Scanning

A curvature-controllable, convex-mirror actuator based on carbon nanotube film composites

A large rotational angle micromirror based on hypocycloidal electrothermal actuators for endoscopic imaging