Multi-Axis Electrothermal Scanning Micromirror with Low Driving Voltage

Kemiao Jia,Huikai Xie

DOI: https://doi.org/10.1109/cleo.2007.4452788

2007-01-01

Abstract:This paper presents the design, fabrication and measurement results of a multi-axis electrothermal micromirror. This micromirror employs unique bimorph actuators to achieve one-dimensional piston motion and two-dimensional rotation.

What problem does this paper attempt to address?

An Electrothermal Micromirror with J-shaped Bimorph Microactuators

Liang Zhou,Dingkang Wang,Huikai Xie

DOI: https://doi.org/10.1109/omn.2019.8925056

2019-01-01

Abstract:A tip-tilt-piston micromirror with four J-shaped bimorph microactuators is developed to increase robustness and stability. The diameter of the central mirror plate is 1 mm and the footprint of the entire device is only 1.6 × 1.6 mm 2 . The micromirror scans 3° (optical) at 2.8 Vdc. The piston mode and rotation mode are measured at 880 Hz and 1555 Hz, respectively.
A Multi-Degree-of-freedom Micromirror Utilizing Inverted-Series-connected Bimorph Actuators

Shane T. Todd,Ankur Jain,Hongwei Qu,Huikai Xie

DOI: https://doi.org/10.1088/1464-4258/8/7/s10

2006-01-01

Abstract:A novel multi-degree-of-freedom electrothermal micromirror design that uses thermal inverted-series-connected (ISC) bimorph actuators is presented. The ISC bimorph actuators eliminate problems observed in previous designs that use single bimorph actuators. The micromirror can operate in one-dimensional (1D) piston-mode and two-dimensional (2D) tilt-mode. Analytical models for the piston-mode and tilt-mode actuations are shown and are compared to FEM simulation results. The device was fabricated using the AMI 1.5 mu m CMOS (complimentary metal-oxide semiconductor) process followed by a post-CMOS micromachining process for device release. The displacement versus temperature of the micromirror was measured experimentally over a range of temperatures and compared to analytical and FEM simulation results. Experimental results showed that the micromirror displaced by 56 mu m at an applied temperature 150 degrees C. The integrated polysilicon heaters were open-circuited during the post-CMOS microfabrication. The failure was caused by pinholes in the metal layers that allowed etchants to attack the polysilicon layer during post-CMOS microfabrication.
An Electrothermal Tip–Tilt–Piston Micromirror Based on Folded Dual S-Shaped Bimorphs

Kemiao Jia,Sagnik Pal,Huikai Xie

DOI: https://doi.org/10.1109/jmems.2009.2023838

IF: 2.829

2009-01-01

Journal of Microelectromechanical Systems

Abstract:This paper presents the design, optimization, fabrication, and test results of an electrothermally actuated tip-tilt-piston micromirror with a large optical aperture of 1 mm. The fabrication of the device is a combination of thin-film surface micromachining and bulk silicon micromachining based on silicon-on-insulator wafers. The device has 3-DOF of actuations, including rotations around two axes in the mirror plane, and out-of-plane piston actuation. The micromirror shows an optical scan range of plusmn30deg about both x- and y-axes and displaces 480 mum in the z-axis, all at dc voltages that are less than 8 V. Dynamic testing of the micromirror shows that the thermal response time of each actuator is about 10 ms. Resonant frequencies of the piston and rotation motion are 336 and 488 Hz, respectively. The unique structural design of the device ensures that there is no lateral shift for the piston motion and no rotation-axis shift for the rotation scanning. With the large tip-tilt-piston scan ranges and low driving voltage, this type of device is very suitable for biomedical imaging and laser beam steering applications.
Design and Microfabrication of an Electrostatically Actuated Scanning Micromirror with Elevated Electrodes

mohd haris,hongwei qu,ankur jain,huikai xie

2008-01-01

Abstract:This paper reports the design and microfabrication of an electrostatically actuated CMOS-MEMS micromirror with elevated electrodes. Two sets of bimorphs are employed to create mismatched vertical comb drives for mirror actuation. Device structural design and fabrication process are detailed and device performance such as scanning angles is simulated using CoventorWare, an integrated MEMS simulator. With a 26 V driving voltage applied to the mismatched comb drives alternately, a rotational angle of over +/- 12 degrees can be realized. The device chips were fabricated using AMI 0.5 mu m CMOS technology through MOSIS. DRIE post-CMOS microfabrication was performed for device release.
Design and investigation of dual-axis electrostatic driving MEMS scanning micromirror

Longqin Wu,Yu-Sheng Lin

DOI: https://doi.org/10.1080/15599612.2024.2350749

2024-05-23

International Journal of Optomechatronics

Abstract:Micro-electro-mechanical system (MEMS) is once proposed in 1970s and evolving rapidly. Current researchers are seeking for better designs and better applications for MEMS actuators. This work presents an electrostatic driven dual-axis scanning micromirror, i.e., two-dimensional (2D) scanning micromirror with mirror size of 500 μm × 500 μm. The scanning mirror is implemented by using bulk micromachining process on silicon on insulator (SOI) substrate, which is compatible with present complementary metal oxide semiconductor (CMOS) manufacturing technology. The scanning frequency of the slow axis and the fast axis is 4.87 kHz and 31.15 kHz, respectively. The impact factors of the dimensions of comb fingers and torsion beams are analyzed and discussed in this study. Under the driving voltage difference of 100 volts and 70 volts, the deviation angle is 4.57° × 13.08°. Therefore, a simple design of a dual-axis MEMS scanning micromirror is proposed, which can be precisely controlled without additional complex sensors or circuits.

engineering, mechanical, electrical & electronic,optics
An Electrothermal SCS Micromirror for Large Bi-directional 2-D Scanning

A Jain,HK Xie

DOI: https://doi.org/10.1109/sensor.2005.1496621

2005-01-01

Abstract:This paper reports the design, fabrication and operation of a two-dimensional (2-D) micromirror that can generate large bi-directional scans at low actuation voltages. The micromirror device has been fabricated by using a unique DRIE CMOS-MEMS process that can simultaneously provide thin-film and single-crystal silicon microstructures. A fabricated micromirror has negligible initial tilt angle, and can perform large bidirectional 2-D optical scans (over +/- 30 degrees) at less than 12 Vdc. 2-D scanning using this mirror has been demonstrated by obtaining a 14 degrees by 50 degrees angular raster scan pattern.
ELECTROTHERMAL SCS MICROMIRROR WITH LARGE-VERTICAL-DISPLACEMENT ACTUATION

A. Jain,H. Qu,S.T. Todd,G.K. Fedder,H. Xie

DOI: https://doi.org/10.31438/trf.hh2004.61

2004-01-01

Abstract:This paper reports a novel large-vertical-displacement (LVD) microactuator that can generate large piston motion at low driving voltage.A LVD micromirror device has been fabricated by using a unique DRIE CMOS-MEMS process that can simultaneously provide thin-film and single-crystal silicon microstructures.With only a 0.7 mm by 0.32 mm sized device, the LVD micromirror demonstrated a vertical displacement of 0.2 mm at an actuation voltage of 6 V d.c.This device can also perform bidirectional rotational scanning through the use of two bimorph actuators.The micromirror can rotate ± 20 , and has negligible initial tilt angle and high scanning speeds (~2 kHz).
A Curved Multimorph Based Electrothermal Micromirror with Large Scan Range and Low Drive Voltage

Sagnik Pal,Huikai Xie

DOI: https://doi.org/10.1016/j.sna.2011.06.011

2011-01-01

Abstract:We report a circular micromirror with a 1mm aperture that has an optical scan range of 60° at 0.68V applied voltage and 11mW power input. The mirror is actuated by a semicircular aluminum (Al)–tungsten (W) electrothermal multimorph that bends and twists upon controlled Joule heating. W acts as an active layer of the multimorph and a resistive heater. The curved actuator design not only maximizes the efficiency of chip area usage, but also achieves high resonant frequency due to torsional stiffness encountered during beam deformation. The first three resonant modes of the micromirror are at 104Hz, 400Hz and 416Hz, respectively. Two-dimensional (2D) optical scanning is demonstrated by using the second resonant mode. The low power consumption may be attributed to the use of a single actuator beam. Mirror-center shift produced by actuator bending and twisting partially compensate each other and this results in 1.6 times lower center-shift compared to previously reported straight multimorph based designs. Device fabrication involves surface and bulk micromachining on an SOI wafer.
An Electrostatic Vertical Comb-Drive Micromirror with Self-Aligned Assembly

Yanjun Fan,Can Cui,Huijun Yu,Wenjiang Shen,Zhi Wang,Jun Li

DOI: https://doi.org/10.1109/nems.2017.8017022

2017-01-01

Abstract:The fabrication and test of a new type of electrostatic vertical comb drive scanning micromirror is presented in this paper. Conventional vertical comb-drive actuators need two structural layers, one for the rotor fingers and a second for the stator fingers. In our work, we fabricated the rotor and stator fingers using one mask lithography step and designed a new assembly method to achieve the vertical comb drive. The mirror wafer and mesa wafer were stacked up and assembled into a vertical comb drive mirror easily. When operating in resonant mode, the fabricated mirror can achieve a mechanical scanning angle of +/- 10.8 degrees with a 95 Vpp sinusoidal signal, and the resonant frequency of the device was 393 Hz.
MEMS mirrors based on a curved concentric electrothermal actuator

lin liu,sagnik pal,huikai xie

DOI: https://doi.org/10.1016/j.sna.2012.03.021

2012-01-01

Abstract:A curved concentric electrothermal actuator has been designed and developed to actuate circular micromirrors with improved area efficiency, while at the same time achieving large scan range at low voltage. This actuator consists of three curved concentric Aluminum/Tungsten bimorphs for fast thermal response and high responsivity, and two rigid frames connected in between for scan range amplification. A tip–tilt–piston micromirror with a circular mirror plate based on this actuator design has been proposed and fabricated. The mirror is capable of scanning ±11° at 0.6V, and generating a 227μm piston displacement at only 0.8V. The measured lateral shift and tilt angle of the mirror plate are less than 7μm and 0.7°, respectively, through the entire piston displacement. A piston-only micromirror has also been demonstrated, and it has even smaller lateral shift of less than 3μm and tilt of less than 0.4° through the piston scan range. This mirror generates large vertical displacement of about 200μm at only 0.9V.
A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion

Shane T. Todd,Ankur Jain,Hongwei Qu,Huikai Xie

DOI: https://doi.org/10.1109/OMEMS.2005.1540059

2005-01-01

Abstract:A new electrothermal micromirror with large piston and tilt motions was proposed and fabricated. Large initial tilt angles and optical path shifting of previously fabricated thermal micro mirrors were eliminated by employing inverted-series-connected (ISC) bimorph actuators
A Thermal Bimorph Micromirror with Large Bi-Directional and Vertical Actuation

A Jain,HW Qu,S Todd,HK Xie

DOI: https://doi.org/10.1016/j.sna.2005.02.001

2005-01-01

Abstract:This paper reports a novel large vertical displacement (LVD) microactuator that can generate large piston motion and bi-directional scanning at low driving voltage. A LVD micromirror device has been fabricated by using a unique deep reactive ion etch (DRIE) post-CMOS micromachining process that simultaneously provides thin-film and single-crystal silicon microstructures. The bimorph actuation structure is composed of aluminum and silicon dioxide with an embedded polysilicon thermal resistor. With a size of only 0.7mm×0.32mm, the LVD micromirror demonstrated a vertical displacement of 0.2mm at 6V dc. This device can also be used to perform bi-directional rotational scanning through the use of two bimorph actuators. The micromirror rotates over ±15° at less than 6V dc, and over ±43° (i.e., >170° optical scan angle) at its resonant frequency of 2.6kHz.
A 2-AXIS SI/AL Bimorph-Based Electrothermal Micromirror Integrated with Piezoresistors for High Resolution Position Sensing

Yue Tang,Xiaoyi Wang,Lixin Xu,Huikai Xie

DOI: https://doi.org/10.1109/mems58180.2024.10439337

2024-01-01

Abstract:In this work, single-crystal silicon (SCS) is employed to replace fragile SiO2 to construct robust 2-axis electrothermal micromirrors with piezoresistors for position sensing. A lateral shift-free (LSF) SCS/Al bimorph electrothermal bimorph actuator is proposed, and a two-axis LSF SCS/Al electrothermal micromirror with piezoresistors was designed, fabricated and characterized. Each actuator was composed of six segments of bimorph and a thin silicon layer with the thickness of 2 mu m. The dimensions of the square mirror plate are 1800 mu m x 1800 mu m x 30 mu m. The fabricated micromirror achieved a tiptilt angle of 7.2 degrees and piston displacement of 240 mu m under a voltage of 5 V. The performance of the angular shift of the proposed micromirror was improved about one order of magnitude with the value decreasing from 0.035 degrees under open-loop control to 0.0062 degrees under closed-loop control. Compared with SiO2-based bimorphs, the fabrication process is not only simplified, but also provides a method for integrating piezoresistive sensors on the bimorph actuator and realizing feedback control.
A Large Piston Displacement MEMS Mirror with Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications

Sean R. Samuelson,Huikai Xie

DOI: https://doi.org/10.1109/jmems.2013.2290994

IF: 2.829

2014-01-01

Journal of Microelectromechanical Systems

Abstract:A large displacement piston motion micromirror is designed, fabricated, and tested with device features tuned to applications requiring ultralow tilt. The fabricated MEMS mirror is based on electrothermal actuation and has a footprint of 1.9mm x 1.9mm with a mirror aperture of 1 mm. The application optimized device holds key features of ultralow maximum tilt of 0.25 degrees and a strongly linear motion of 90 mu m achievable at only 1.2 V. This device is further characterized in an interferometric system to determine the piston mode and the accurate piston displacement as a function of voltage, power, and frequency.
Design and fabrication of 2D fast electrothermal micromirrors with large scan range and small center shift

Pal, S.,Huikai Xie

DOI: https://doi.org/10.1109/TRANSDUCERS.2011.5969768

2011-01-01

Abstract:We report an elliptical micromirror actuated by a curved electrothermal multimorph that bends and twists upon controlled Joule heating. The mirror plate is elliptical with 92 μm major axis and 142 μm minor axis. The micromirror has an optical scan angle of 22° at 0.37 V applied voltage or 9 mW power input. Mirror-center shift produced by multimorph bending and twisting compensate each other and is only 14.5 μm at an optical scan angle of 22°. The curved actuator shape maximizes chip-area utilization and ensures a high resonant frequency. The first three resonant modes are at 3.9 kHz, 8.6 kHz and 17 kHz. Two-dimensional (2D) optical scanning is demonstrated using the second and third resonant modes.
Design and Fabrication of a 2-Axis Electrothermal MEMS Micro-Scanner for Optical Coherence Tomography

Quentin A. A. Tanguy,Sylwester Bargiel,Huikai Xie,Nicolas Passilly,Magali Barthes,Olivier Gaiffe,Jaroslaw Rutkowski,Philippe Lutz,Christophe Gorecki

DOI: https://doi.org/10.3390/mi8050146

IF: 3.4

2017-01-01

Micromachines

Abstract:This paper introduces an optical 2-axis Micro Electro-Mechanical System (MEMS) micromirror actuated by a pair of electrothermal actuators and a set of passive torsion bars. The actuated element is a dual-reflective circular mirror plate of 1 m m in diameter. This inner mirror plate is connected to a rigid frame via a pair of torsion bars in two diametrically opposite ends located on the rotation axis. A pair of electrothermal bimorphs generates a force onto the perpendicular free ends of the mirror plate in the same angular direction. An array of electrothermal bimorph cantilevers deflects the rigid frame around a working angle of 45 ∘ for side-view scan. The performed scans reach large mechanical angles of 32 ∘ for the frame and 22 ∘ for the in-frame mirror. We denote three resonant main modes, pure flexion of the frame at 205 Hz , a pure torsion of the mirror plate at 1.286 kHz and coupled mode of combined flexion and torsion at 1.588 kHz . The micro device was fabricated through successive stacks of materials onto a silicon-on-insulator wafer and the patterned deposition on the back-side of the dual-reflective mirror is achieved through a dry film photoresist photolithography process.
A Two-Axis Electrothermal Micromirror For

Ankur Jain,Anthony Kopa,Yingtian Pan,Gary K. Fedder,Huikai Xie

2004-01-01

Abstract:This paper reports a 1-mm , two-axis, single-crys- talline-silicon (SCS)-based aluminum-coated scanning mi- cromirror with large rotation angle (up to 40 ), which can be used in an endoscopic optical coherence tomography imaging system. The micromirror is fabricated using a deep reactive ion etch post-CMOS micromachining process. The static response, frequency response, resonance frequency shift, and thermal imaging of the device are presented. A 4 4 pixel display using this two-dimensional micromirror device has been demonstrated. Index Terms—Electrothermal actuation, microactuators, op- tical coherence tomography, optical scanners, two-dimensional (2-D) mirrors.
Study On Dynamic Scanning Performance Of A 2-Axis Mems Electrothermal Micromirror

Kaili Liu,Yongming Tang,Shuming Lan,Huikai Xie

2011-01-01

Abstract:An MEMS-based pico-projector is reported in this paper. The scanning element is an electrothermal MEMS micromirror with a unique three-segment bimorph actuator design. A testing apparatus has been built to assess the dynamic scanning performances of the micromirror. The phenomena of dynamic hysteresis and distortion are observed and systematically analyzed. It is measured that the phase delay between the excitation signal and the scanning angle measured by a PSD is 11.25 degrees at 30 Hz. Optics design are utilized to minimize the image distortion. Several scanning patterns such as a round, a rhodonea curve, and a grating have been obtained.
A large rotational angle micromirror based on hypocycloidal electrothermal actuators for endoscopic imaging

Xiaojing Mu,Yingshun Xu,Singh, J.,Nanguang Chen

DOI: https://doi.org/10.1109/OMEMS.2010.5672202

2010-01-01

Abstract:The paper presents a large rotational angle micromirror base on hypocycloidal electrothermal actuators for circumferential endoscopic imaging. The micromirror consists of a double-side Cr/Au coated high reflective mirror plate (1mm by 0.8mm) laterally supported by two hypocycloidal electrothermal actuators on both sides (Fig. 1(a)). In our design, 1μm PVD Al deposited on 2μm single crystal silicon (SCS) forms a bimorph microstructure with the length of 800 μm and the width of 60μm. Four bimorph structures were staggerly connected in parallel to form a hypocycloidal electrothermal actuator. In this configuration, a metal layer was on a silicon backbone in one bimorph structure while the metal layer was deposited below the silicon backbone in adjacent bimorph structures (Fig. 1(b)). Since the radius of curvature of each bimorph structure is the same, the deflection of each structure is the same. Hence the rotational axis keeps still and there is no lateral shifting effect. Simulations via finite element analysis (FEA) show that the mechanical deflection angle of a micromirror significantly increases by using this actuator design. 141.2° was found in the design with fully double-side Al coated actuators (Fig. 2(a, b)) and 68.6° was found in the design with only frontside Al coated actuators (Fig. 2(c, d)). Micromirrors were fabricated by a post-CMOS MEMS process on 8 inches SOI wafers. An optical microscopic image and a scanning electron microscope (SEM) micrograph of a released micromirror are shown in Fig. 3(a) and (b), respectively. However, so far we have not successfully patterned Al layer below the SCS layer as part of the actuator and therefore only micromirrors equipped by frontside Al coated actuators were experimentally characterized (Fig. 4). ~35° mechanical deflection was achieved by 2.6 V DC input voltage (Fig. 5). It has a discrepancy in comparison in comparison with the FEA simulation. -3dB cutoff f- - requency was found to be about 29 Hz as the large signal frequency response (Fig. 5). Current-voltage relationship of an electrothermal actuator is also shown in Fig. 5. A series of frames from a video of a switching micromirror shows various tilting angles of the micromirror under a sinusoidal drive signal with the amplitude of 2.6 V was still with absence of microstructures with backside Al coated, the concept of achieving large deflection angle by using hypocycloidal electrothermal actuators has been demonstrated. Both FEA simulation and experimental results prove the capability of the Single-axis rotational micromirror device.
A Large-Piston Scanning Electrothermal Micromirror with A Temperature Control Frame

Jiawen Luo,Zhiming Chen,Yingtao Ding,Qiao Chen,Jinling Ding,Jin Cheng,Huikai Xie

DOI: https://doi.org/10.1109/omn.2016.7565914

2016-01-01

Abstract:An electrothermal bimorph micromirror with integrated temperature control is presented. The central mirror plate position is controlled against the ambient temperature variation through a thermally-isolated frame with embedded Pt heaters and temperature sensors.

Multi-Axis Electrothermal Scanning Micromirror with Low Driving Voltage

An Electrothermal Micromirror with J-shaped Bimorph Microactuators

A Multi-Degree-of-freedom Micromirror Utilizing Inverted-Series-connected Bimorph Actuators

An Electrothermal Tip–Tilt–Piston Micromirror Based on Folded Dual S-Shaped Bimorphs

Design and Microfabrication of an Electrostatically Actuated Scanning Micromirror with Elevated Electrodes

Design and investigation of dual-axis electrostatic driving MEMS scanning micromirror

An Electrothermal SCS Micromirror for Large Bi-directional 2-D Scanning

ELECTROTHERMAL SCS MICROMIRROR WITH LARGE-VERTICAL-DISPLACEMENT ACTUATION

A Curved Multimorph Based Electrothermal Micromirror with Large Scan Range and Low Drive Voltage

An Electrostatic Vertical Comb-Drive Micromirror with Self-Aligned Assembly

MEMS mirrors based on a curved concentric electrothermal actuator

A 3-D micromirror utilizing inverted-series-connected electrothermal bimorph actuators for piston and tilt motion

A Thermal Bimorph Micromirror with Large Bi-Directional and Vertical Actuation

A 2-AXIS SI/AL Bimorph-Based Electrothermal Micromirror Integrated with Piezoresistors for High Resolution Position Sensing

A Large Piston Displacement MEMS Mirror with Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications

Design and fabrication of 2D fast electrothermal micromirrors with large scan range and small center shift

Design and Fabrication of a 2-Axis Electrothermal MEMS Micro-Scanner for Optical Coherence Tomography

A Two-Axis Electrothermal Micromirror For

Study On Dynamic Scanning Performance Of A 2-Axis Mems Electrothermal Micromirror

A large rotational angle micromirror based on hypocycloidal electrothermal actuators for endoscopic imaging

A Large-Piston Scanning Electrothermal Micromirror with A Temperature Control Frame