Micro Shell Resonator with T-shape Masses Fabricated by Micro Blow-Torching Using Whirling Platform

Wei Li,Zhanqiang Hou,Kun Lu,Yan Shi,Dingbang Xiao,Yulie Wu,Xuezhong Wu
DOI: https://doi.org/10.1109/transducers.2017.7994441
2017-01-01
Abstract:This paper proposes and demonstrates a novel process to improve structural symmetry and surface quality of fused silica (FS) micro shell resonator (MSR) with T-shape masses. The whirling platform is presented to improve micro blow-torching for fabricating FS MSR. A sub-nanometer smooth surface quality (0.404 nm Ra) and a high radial symmetry of less than 9μm (about 0.1% relative tolerance) has been obtained, which describes better structural symmetry and surface quality. Experimental results reveal a good frequency symmetry of 0.175% at wineglass modes frequency of 6904.4Hz and 6916.5Hz.
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