Abstract:<p class="a-plus-plus">The interfacial wear between silicon and amorphous silica in water environment is critical in numerous applications. However, the understanding regarding the micro dynamic process is still unclear due to the limitations of apparatus. Herein, reactive force field simulations are utilized to study the interfacial process between silicon and amorphous silica in water environment, exploring the removal and damage mechanism caused by pressure, velocity, and humidity. Moreover, the reasons for high removal rate under high pressure and high velocity are elucidated from an atomic perspective. Simulation results show that the substrate is highly passivated under high humidity, and the passivation layer could alleviate the contact between the abrasive and the substrate, thus reducing the damage and wear. In addition to more Si-O-Si bridge bonds formed between the abrasive and the substrate, new removal pathways such as multibridge bonds and chain removal appear under high pressure, which cause higher removal rate and severer damage. At a higher velocity, the abrasive can induce extended tribochemical reactions and form more interfacial Si-O-Si bridge bonds, hence increasing removal rate. These results reveal the internal cause of the discrepancy in damage and removal rate under different conditions from an atomic level.</p>

Kinetic Monte Carlo Study on the Evolution of Silicon Surface Roughness under Hydrogen Thermal Treatment

Evolutionary Process of Nanoscale FinFET Channel in Hydrogen Thermal Treatment Technology

Temperature dependence of the surface roughness evolution during hydrogenated amorphous silicon film growth

An Optimized FinFET Channel with Improved Line-Edge Roughness and Linewidth Roughness Using the Hydrogen Thermal Treatment Technology

Molecular Dynamics Study on Splitting of Hydrogen-Implanted Silicon in Smart-Cut® Technology

Investigation on the Impact of Hydrogen on the Passivation of Silicon Surface States in Clean and Copper Contaminated Conditions

Molecular Dynamics Simulation for Intrinsic Stress Caused by Surface Oxidation on Hydrogenated Amorphous Silicon

Surface Orientation and Temperature Effects on the Interaction of Silicon with Water: Molecular Dynamics Simulations Using ReaxFF Reactive Force Field.

Kinetics of Silane Decomposition in High-Pressure Confined Chemical Vapor Deposition of Hydrogenated Amorphous Silicon

Atomistic understanding of interfacial processing mechanism of silicon in water environment: A ReaxFF molecular dynamics simulation

Molecular dynamics simulation of silicon vacancy defects in silicon carbide by hydrogen ion implantation and subsequent annealing

Self-diffuse Nanostructures on Silicon Surfaces Through Rapid Annealing at High Temperatures

Molecular insight of the interface evolution of silicon carbide under hyperthermal atomic oxygen impact

Hydrogen etching of 4H–SiC(0001) facet and step formation

Molecular dynamics study of particle-particle collisions between hydrogen-passivated silicon nanoparticles

Micro/nano structure size effect on superhydrophobicity and anti reflection of single crystalline Si solar cells

Numerical Study of Heat Transfer in a Two-Dimensional Rarefied Hydrogen Gas Moved Jet Impingement Using Direct Simulation Monte Carlo-Finite Difference Coupled Method

Investigation of Material Removal Mechanism of Silicon Wafer in the Chemical Mechanical Polishing Process Using Molecular Dynamics Simulation Method

Surface Morphology Evolution of Cobalt Nanoparticle Induced by Hydrogen Adsorption: A Theoretical Study

In Situ Observation of Hydrogen‐Induced Surface Faceting for Palladium–Copper Nanocrystals at Atmospheric Pressure

Ab initio approach for thermodynamic surface phases with full consideration of anharmonic effects -- the example of hydrogen at Si(100)