Deep-ultraviolet detectors based on oxygen-/fluorine-terminated (100) diamond

F.N. Li,Jintao Zhang,Xianhua Wang,Zongchen Liu,W. Wang,J. Fu,T.F. Zhu,Hongxing Wang

DOI: https://doi.org/10.1016/j.spmi.2016.09.030

IF: 3.22

2016-01-01

Superlattices and Microstructures

Abstract:In this study, deep-ultraviolet detectors based on oxygen-/fluorine-terminated (100) diamond (O-/F-diamond) have been fabricated. Both of the O-/F-diamond surfaces have been formed on different areas of one (100) diamond sample by O2 and CF4 plasma. Pd has been evaporated on the O-/F-diamond surfaces to form Schottky contact, whose barrier heights have been investigated by X-ray photoelectron spectroscopy technique. Deep-ultraviolet detector based on F-diamond shows lower dark current than that based on O-diamond.