Abstract:Silicon photonics is the most promising technology for applications ranging from large-bandwidth, low power consumption datacom transceivers, to wearable health monitoring devices, or optical data-bus for quantum processors. To bring silicon PIC based products to the market, ultra-low loss waveguides would be preferred. In the conventional submicron silicon platforms, higher propagation loss (in the order of ~1 dB/cm) induced by the roughness of the etched sidewalls, as well as higher fiber-to-waveguide coupling loss due to its sub-micron dimensions impose challenges for its deployment in many products. VTT’s thick-SOI technology offers a promising alternative, owing to its lower propagation loss (~0.1 dB/cm), reduced polarization sensitivity, and capacity to handle higher optical power without exciting nonlinear losses. Its micron-scale cross-section enables efficient edge coupling. Exploiting its ultra-low loss, we have demonstrated unprecedented level of integration such as, a 40-channel array waveguide grating (AWG) based mux/de-mux, or a Faraday rotator based on silicon spirals, without employing any magneto-optic material. Now we reduced the propagation loss further, down to record-low 4 dB/m, by controlled annealing of waveguides in 100% pure H2 environment. In our optimized, MPW-compatible annealing process, the atomic mobility of Si smoothens the scallops from etching, without causing any structural deformation of the waveguides. This substantially reduced loss enabled us to develop ultra-high Q ring resonators on our thick-SOI platform, as well as sidewall smoothening for the active components, thereby making our platform a bedrock for the emerging applications such as, quantum computing, biosensors, and 3D imaging.

Low Loss Fiber-to-Waveguide Converter With a 3-D Functional Taper for Silicon Photonics

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Efficient Adiabatic Silicon-on-insulator Waveguide Taper

Low-loss 3-dimensional waveguide crossing with a parabolic taper interlayer coupler based on a SiN-SiN-Si three-layer platform

Optimal Design of a Silicon-on-insulator Nanowire Waveguide for Broadband Wavelength Conversion

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Silicon-on-Insulator Waveguide Devices for Broadband Mid-Infrared Photonics

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Experimental Demonstration of an Apodized-Imaging Chip-Fiber Grating Coupler for Si_3N_4 Waveguides

Compact and Low-Loss 1 × 3 Polarization-Insensitive Optical Power Splitter Using Cascaded Tapered Silicon Waveguides

Ultra-low-loss Inverted Taper Coupler for Silicon-on-insulator Ridge Waveguide

Ultralow-loss Waveguide Crossing for Photonic Integrated Circuits by Using Inverted Tapers

Power-Attenuated Optimization for Four-Wave Mixing-Based Wavelength Conversion in Silicon Nanowire Waveguides

High-efficiency Wideband SiNx-on-SOI Grating Coupler with Low Fabrication Complexity.

Design of Silicon Photonic Wavelength Conversion Chip for Mode-division Multiplexing Signals

Optimal design of silicon-on-insulator nano-wire waveguides for broadband wavelength conversion

Efficient Grating Couplers for Optical Fibers to Ultra-Low-loss Waveguides

Low-loss and high stability standard single mode fiber edge couplers for silicon photonics

Ultra-low loss waveguide platform in silicon photonics

A low-loss, compact, broadband, polarization insensitive edge coupler for silicon photonics