Abstract:Nanopore sensing is a key technology for single-molecule detection and analysis. Solid-state nanopores have emerged as a versatile platform, since their fabrication allows to engineer their properties by controlling size, shape, and chemical functionalization. However, lithography-based fabrication approaches for non-planar nanopores-on-chip rely on polymers that have limits with respect to hard- and robustness, durability, and refractive index. In this respect, nanopores made of metal oxides with high dielectric constant would be much more favourable and have the potential to extend the suitability of solid-state nanopores towards optoelectronic technologies. Here, we present a versatile method to fabricate three-dimensional nanopores of different dielectric oxides with controlled shapes. Our approach uses photoresist only as a template in the focused-ion-beam lithography to define the nanopore shape, which is subsequently coated with different oxides (SiO2, Al2O3, TiO2 and HfO2) by atomic-layer deposition. Then the photoresist is fully removed by chemo-physical treatment, resulting in nanopores entirely made from dielectric oxides on a thin solid-state membrane. Our methodology allows straightforward fabrication of convex, straight, and concave nanopore shapes that can be employed in various technologies and applications. We explored their performance as ionic nanochannels and investigated the dependence of the ionic current rectification on the nanopore geometry. We found hysteresis in the ionic conductance that enables potential applications of the nanopores in memristors. We also investigated the dielectric oxide nanopores for DNA sensing by measuring both cis-trans and trans-cis translocations and support our data with numerical simulations based on the Poisson-Nernst-Planck model.

3D Nanopore Shape Control by Current-Stimulus Dielectric Breakdown

Control of DNA capture by nanofluidic transistors.

EFFICIENT CONTROL OF DNA TRANSPORT IN NANOPORE-BASED NANOFLUIDIC TRANSISTORS

Muitilpe Nanopores Fabrication in a SiNX Membrane Via Controlled Breakdown

Multiple-Nanopores Fabrication Based on Dielectric Breakdown

Nanopore Design for Exceptional Rectification of DNA Translocation

Nanopore Fabrication by Controlled Dielectric Breakdown

Self-Limited Formation of Bowl-Shaped Nanopores for Directional DNA Translocation

Detection of Biomolecules Using Solid-State Nanopores Fabricated by Controlled Dielectric Breakdown

Self-Aligned Nanopore Formed on a SiO2 Pyramidal Membrane by a Multipulse Dielectric Breakdown Method

Tailored Fabrication of 3D Nanopores with Dielectric Oxides for Multiple Nanoscale Applications

Single Nucleobase Identification for Transversally-Confined Ssdna Using Longitudinal Ionic Currents.

DNA Volume, Topology, and Flexibility Dictate Nanopore Current Signals

Photothermally Assisted Thinning of Silicon Nitride Membranes for Ultrathin Asymmetric Nanopores.

Fabrication of Multiple Nanopores in a SiNx Membrane Via Controlled Breakdown.

Controlled Deformation of Si3N4nanopores Using Focused Electron Beam in a Transmission Electron Microscope

Fabrication of Nanopores Using Controlled Dielectric Breakdown

Controllable Fabrication and Rectification of Bipolar Nanofluid Diodes in Funnel-Shaped Si3 N4 Nanopores.

Localized nanopore fabrication in silicon nitride membranes by femtosecond laser exposure and subsequent controlled breakdown.

Direction- and Salt-Dependent Ionic Current Signatures for DNA Sensing with Asymmetric Nanopores.

High fidelity moving Z-score based controlled breakdown fabrication of solid-state nanopore